MEMS for photonic integrated circuits
C Errando-Herranz, AY Takabayashi… - IEEE Journal of …, 2019 - ieeexplore.ieee.org
The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs)
is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve …
is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve …
A comparative review of MEMS-based optical cross-connects for all-optical networks from the past to the present day
M Stepanovsky - IEEE Communications Surveys & Tutorials, 2019 - ieeexplore.ieee.org
Micro-electro-mechanical systems (MEMS)-based cross-connects are widely used for all-
optical switching in recent optical networks. This paper provides a brief overview of various …
optical switching in recent optical networks. This paper provides a brief overview of various …
Large-scale silicon photonic switches with movable directional couplers
Fast optical circuit switches (OCSs) with high port count offer reconfigurable bandwidth in
optical networks and have the potential to significantly increase the performance and …
optical networks and have the potential to significantly increase the performance and …
Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers
Y Akihama, K Hane - Light: Science & Applications, 2012 - nature.com
Silicon photonic devices consisting of nanowire waveguides are a promising technology for
on-chip integration in future optical telecommunication and interconnection systems based …
on-chip integration in future optical telecommunication and interconnection systems based …
Devices based on co-integrated MEMS actuators and optical waveguide: a review
F Chollet - Micromachines, 2016 - mdpi.com
The convergence of Micro Electro Mechanical Systems (MEMS) and optics was, at the end
of the last century, a fertile ground for a new breed of technological and scientific …
of the last century, a fertile ground for a new breed of technological and scientific …
Highly scalable digital silicon photonic MEMS switches
Optical circuit switches with fast switching times can provide rapidly reconfigurable
bandwidth in data center networks. Silicon photonic switches are attractive candidates with …
bandwidth in data center networks. Silicon photonic switches are attractive candidates with …
Ultra-small silicon waveguide coupler switch using gap-variable mechanism
Y Akihama, Y Kanamori, K Hane - Optics express, 2011 - opg.optica.org
Submicron-wide silicon waveguide coupler with gap variable mechanism is proposed for a
compact optical waveguide switch. Two freestanding silicon waveguides are placed parallel …
compact optical waveguide switch. Two freestanding silicon waveguides are placed parallel …
Low-voltage MEMS optical phase modulators and switches on a indium phosphide membrane on silicon
T Liu, F Pagliano, R van Veldhoven… - Applied Physics …, 2019 - pubs.aip.org
In this paper, an optical switch based on a microelectromechanical phase modulator is
presented. Phase tuning is achieved by tuning the vertical gap between two vertically …
presented. Phase tuning is achieved by tuning the vertical gap between two vertically …
Nano-opto-electro-mechanical switch based on a four-waveguide directional coupler
T Liu, F Pagliano, A Fiore - Optics express, 2017 - opg.optica.org
Optical switches connect optical circuits, and route optical signals in networks. Nano-
electromechanical systems can in principle enable compact and power-effective switches …
electromechanical systems can in principle enable compact and power-effective switches …
End-coupled optical waveguide MEMS devices in the indium phosphide material system
MW Pruessner, N Siwak, K Amarnath… - Journal of …, 2006 - iopscience.iop.org
We demonstrate electrostatically actuated end-coupled optical waveguide devices in the
indium phosphide (InP) material system. The design of a suitable layer structure and …
indium phosphide (InP) material system. The design of a suitable layer structure and …