MEMS for photonic integrated circuits

C Errando-Herranz, AY Takabayashi… - IEEE Journal of …, 2019 - ieeexplore.ieee.org
The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs)
is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve …

A comparative review of MEMS-based optical cross-connects for all-optical networks from the past to the present day

M Stepanovsky - IEEE Communications Surveys & Tutorials, 2019 - ieeexplore.ieee.org
Micro-electro-mechanical systems (MEMS)-based cross-connects are widely used for all-
optical switching in recent optical networks. This paper provides a brief overview of various …

Large-scale silicon photonic switches with movable directional couplers

S Han, TJ Seok, N Quack, BW Yoo, MC Wu - Optica, 2015 - opg.optica.org
Fast optical circuit switches (OCSs) with high port count offer reconfigurable bandwidth in
optical networks and have the potential to significantly increase the performance and …

Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers

Y Akihama, K Hane - Light: Science & Applications, 2012 - nature.com
Silicon photonic devices consisting of nanowire waveguides are a promising technology for
on-chip integration in future optical telecommunication and interconnection systems based …

Devices based on co-integrated MEMS actuators and optical waveguide: a review

F Chollet - Micromachines, 2016 - mdpi.com
The convergence of Micro Electro Mechanical Systems (MEMS) and optics was, at the end
of the last century, a fertile ground for a new breed of technological and scientific …

Highly scalable digital silicon photonic MEMS switches

TJ Seok, N Quack, S Han, RS Muller… - Journal of Lightwave …, 2016 - opg.optica.org
Optical circuit switches with fast switching times can provide rapidly reconfigurable
bandwidth in data center networks. Silicon photonic switches are attractive candidates with …

Ultra-small silicon waveguide coupler switch using gap-variable mechanism

Y Akihama, Y Kanamori, K Hane - Optics express, 2011 - opg.optica.org
Submicron-wide silicon waveguide coupler with gap variable mechanism is proposed for a
compact optical waveguide switch. Two freestanding silicon waveguides are placed parallel …

Low-voltage MEMS optical phase modulators and switches on a indium phosphide membrane on silicon

T Liu, F Pagliano, R van Veldhoven… - Applied Physics …, 2019 - pubs.aip.org
In this paper, an optical switch based on a microelectromechanical phase modulator is
presented. Phase tuning is achieved by tuning the vertical gap between two vertically …

Nano-opto-electro-mechanical switch based on a four-waveguide directional coupler

T Liu, F Pagliano, A Fiore - Optics express, 2017 - opg.optica.org
Optical switches connect optical circuits, and route optical signals in networks. Nano-
electromechanical systems can in principle enable compact and power-effective switches …

End-coupled optical waveguide MEMS devices in the indium phosphide material system

MW Pruessner, N Siwak, K Amarnath… - Journal of …, 2006 - iopscience.iop.org
We demonstrate electrostatically actuated end-coupled optical waveguide devices in the
indium phosphide (InP) material system. The design of a suitable layer structure and …