Amorphous/crystalline silicon heterojunction (SHJ) solar cells are well known for their
inherent high open-circuit voltage (V OC) potential, much better temperature coefficient …

In plasma processing, capacitive discharges have classically been operated in the
electrostatic regime, for which the excitation wavelength λ is much greater than the electrode …

A summary is given of different elementary processes influencing the thermal balance and
energetic conditions of substrate surfaces during plasma processing. The discussed …

Pulsed plasmas use much higher power during each pulse compared to continuously
operated plasmas. This feature and the appearance of additional new variables such as …

Experiments using a lens-shaped circular electrode are described to measure the correction
of plasma nonuniformity due to the standing wave effect in a large area very high frequency …

Ion energy distribution functions and ion fluxes in low-pressure, high-frequency (13.56–80
MHz) capacitive discharges were investigated both theoretically and experimentally. In most …

One-dimensional particle-in-cell simulation is used to simulate the capacitively coupled
argon plasma for a range of excitation frequency from 13.56 MHz to 100 MHz. The argon …

This paper reviews recent work on the development of thin film silicon solar modules and
cost-effective production technology. Noting the potential of VHF-PECVD for high rate and …

This paper presents the discharge properties of a novel cylindrical Capacitively Coupled
Plasma (CCP) discharge with an axisymmetric magnetic field. It is observed that with an …

The various issues relating to the nature of high built-up stresses in diamond like carbon
(DLC) films are presented and analyzed and the utility of pulse plasma technique in growing …