The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …

The merging of silicon microfabrication techniques with surface functionalization
biochemistry offers new exciting opportunities in developing microscopic biomedical …

Piezoresistive sensors are among the earliest micromachined silicon devices. The need for
smaller, less expensive, higher performance sensors helped drive early micromachining …

“Piezoelectric-Based Vibration-control Systems: Applications in Micro/Nano Sensors and
Actuators” covers: Fundamental concepts in smart (active) materials including piezoelectric …

We present a chemical sensor based on a microfabricated array of eight silicon cantilevers
actuated at their resonance-frequency and functionalized by polymer coatings. The …

Diagnosis and management of diabetes require quantitative and selective detection of blood
glucose levels. We report a technique for micromechanical detection of biologically relevant …

The sensing behavior of polymer-coated resonant cantilevers for mass-sensitive detection of
volatile organic compounds was investigated. Industrial complementary metal oxide …

We report an electro-mechanical biosensor for electrical detection of proteins with disease
markers using self-sensing piezoresistive micro-cantilevers. Electrical detection, via surface …

Microfabrication processes for chemical and biochemical sensors are reviewed. Standard
processing steps originating from semiconductor technology are detailed, and specific …

A promising approach for detecting biomolecules follows their binding to immobilized probe
molecules on microfabricated cantilevers; binding causes surface stresses that bend the …