Mechanisms for fatigue of micron‐scale silicon structural films
Although bulk silicon is not susceptible to fatigue, micron‐scale silicon is. Several
mechanisms have been proposed to explain this surprising behavior although the issue …
mechanisms have been proposed to explain this surprising behavior although the issue …
An introduction to microelectromechanical systems engineering
N Maluf - Measurement Science and Technology, 2002 - iopscience.iop.org
If you've not been involved in MEMS (MicroElectroMechanical Systems) technology or had
the cause to use MEMS devices, then you may wonder what all the fuss is about. What are …
the cause to use MEMS devices, then you may wonder what all the fuss is about. What are …
Dynamic fatigue of silicon
H Kahn, R Ballarini, AH Heuer - Current Opinion in Solid State and …, 2004 - Elsevier
Dynamic fatigue of silicon is a fairly recent area of materials research, having been detected
for the first time in 1992. Within the past year, there have been several reports on silicon …
for the first time in 1992. Within the past year, there have been several reports on silicon …
Long-term characterization of a new wide-angle micromirror with PZT actuation and PZR sensing
P Frigerio, B Di Diodoro, V Rho… - Journal of …, 2021 - ieeexplore.ieee.org
This work presents a long-term characterization of a newly designed
microelectromechanical-system (MEMS) micromirror capable of achieving a field-of-view …
microelectromechanical-system (MEMS) micromirror capable of achieving a field-of-view …
Mechanical fatigue of polysilicon: Effects of mean stress and stress amplitude
H Kahn, L Chen, R Ballarini, AH Heuer - Acta materialia, 2006 - Elsevier
Polycrystalline silicon (polysilicon) fatigue specimens with micrometer-sized dimensions
were fabricated and subjected to cyclic loading using an integrated electrostatic actuator …
were fabricated and subjected to cyclic loading using an integrated electrostatic actuator …
Very high-cycle fatigue failure in micron-scale polycrystalline silicon films: Effects of environment and surface oxide thickness
Fatigue failure in micron-scale polycrystalline silicon structural films, a phenomenon that is
not observed in bulk silicon, can severely impact the durability and reliability of …
not observed in bulk silicon, can severely impact the durability and reliability of …
A cumulative fatigue damage model of polysilicon films for MEMS resonator under repeated loadings
Prior work is primarily focused on observation and analysis of experimental results of fatigue
loadings, while an insightful damage model describing the evolvement of distributed …
loadings, while an insightful damage model describing the evolvement of distributed …
Investigation of the low-cycle fatigue mechanism for micron-scale monocrystalline silicon films
EK Baumert, PO Theillet, ON Pierron - Acta Materialia, 2010 - Elsevier
This study investigated the cyclic and static fatigue properties of 10μm thick, deep reactive
ion etched, monocrystalline silicon films. Stress–life fatigue curves and fatigue degradation …
ion etched, monocrystalline silicon films. Stress–life fatigue curves and fatigue degradation …
Fatigue failure in thin-film polycrystalline silicon is due to subcritical cracking within the oxide layer
It has been established that microelectromechanical systems created from polycrystalline
silicon thin films are subject to cyclic fatigue. Prior work by the authors has suggested that …
silicon thin films are subject to cyclic fatigue. Prior work by the authors has suggested that …
Comparative investigations of multi-fidelity modeling on performance of electrostatically-actuated cracked micro-beams
K Larkin, A Hunter, A Abdelkefi - International Journal of Mechanical …, 2021 - Elsevier
Silicon is a commonly used material for the fabrication of beams for use in micro-electrical-
mechanical systems (MEMS). Although silicon is a brittle material, it has been shown to …
mechanical systems (MEMS). Although silicon is a brittle material, it has been shown to …