Plasticity of micrometer-scale single crystals in compression

MD Uchic, PA Shade, DM Dimiduk - Annual Review of Materials …, 2009 - annualreviews.org
This review examines the recent literature that has focused on uniaxial compression
experiments of single crystals at the micrometer scale. Collectively, the studies discovered …

Nanoindentation and mechanical properties of materials at submicro-and nanoscale levels: Recent results and achievements

YI Golovin - Physics of the Solid State, 2021 - Springer
The review is dedicated to characteristics of the mechanical behavior of various materials at
submicro-and nanoscale levels. To a large extent, progress in this area is determined by the …

A further step towards an understanding of size-dependent crystal plasticity: In situ tension experiments of miniaturized single-crystal copper samples

D Kiener, W Grosinger, G Dehm, R Pippan - Acta Materialia, 2008 - Elsevier
A method for in situ testing of miniaturized tension specimen was developed. The size
effects of the plastic deformation behavior of copper single crystals loaded along the〈 …

Brittle‐to‐ductile transition in uniaxial compression of silicon pillars at room temperature

F Östlund, K Rzepiejewska‐Malyska… - Advanced Functional …, 2009 - Wiley Online Library
Robust nanostructures for future devices will depend increasingly on their reliability. While
great strides have been achieved for precisely evaluating electronic, magnetic, photonic …

Micro-manufacturing: research, technology outcomes and development issues

Y Qin, A Brockett, Y Ma, A Razali, J Zhao… - … International Journal of …, 2010 - Springer
Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort
in micro-manufacturing is also in non-MEMS-based manufacturing. Research and …

Microstructure versus Size: Mechanical Properties<? format?> of Electroplated Single Crystalline Cu Nanopillars

AT Jennings, MJ Burek, JR Greer - Physical review letters, 2010 - APS
We report results of uniaxial compression experiments on single-crystalline Cu nanopillars
with nonzero initial dislocation densities produced without focused ion beam (FIB) …

Micro-compression testing: A critical discussion of experimental constraints

D Kiener, C Motz, G Dehm - Materials Science and Engineering: A, 2009 - Elsevier
Micro-compression testing is a promising technique for determining mechanical properties
at small length scales since it has several benefits over nanoindentation. However, as for all …

Elevated temperature, nano-mechanical testing in situ in the scanning electron microscope

JM Wheeler, J Michler - Review of Scientific Instruments, 2013 - pubs.aip.org
A general nano-mechanical test platform capable of performing variable temperature and
variable strain rate testing in situ in the scanning electron microscope is described. A variety …

Achieving micron-scale plasticity and theoretical strength in Silicon

M Chen, L Pethö, AS Sologubenko, H Ma… - Nature …, 2020 - nature.com
As the backbone material of the information age, silicon is extensively used as a functional
semiconductor and structural material in microelectronics and microsystems. At ambient …

Alumina etch masks for fabrication of high-aspect-ratio silicon micropillars and nanopillars

MD Henry, S Walavalkar, A Homyk, A Scherer - Nanotechnology, 2009 - iopscience.iop.org
We introduce using sputtered aluminum oxide (alumina) as a resilient etch mask for
fluorinated silicon reactive ion etches. Achieving selectivity of 5000: 1 for cryogenic silicon …