Varifocal MEMS mirrors for high-speed axial focus scanning: a review

J Pribošek, M Bainschab, T Sasaki - Microsystems & Nanoengineering, 2023 - nature.com
Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …

Characterization of a fast piezoelectric varifocal MEMS mirror

P Janin, R Bauer, P Griffin, E Riis… - … on Optical MEMS …, 2018 - ieeexplore.ieee.org
We present the characterization of a novel design for a varifocal MEMS mirror with
piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated …

Resonant varifocal micromirror with piezoresistive focus sensor

K Nakazawa, T Sasaki, H Furuta, J Kamiya, H Sasaki… - Micromachines, 2016 - mdpi.com
This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror
integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a …

Laser beam shaping with magnetic fluid-based liquid deformable mirrors

ZZ Wu, Z Zhang, XH Kong, JQ Wu, T Wang… - Chinese …, 2017 - iopscience.iop.org
A new controllable laser beam shaping technique is demonstrated, where a magnetic fluid-
based liquid deformable mirror is proposed to redistribute the laser phase profile and thus …

SOIMUMPs micromirror scanner and its application in laser line generator

H Zuo, FH Nia, S He - Journal of Micro/Nanolithography …, 2017 - spiedigitallibrary.org
A SOIMUMPs 1-D rotation micromirror is presented. The micromirror is driven by
electrostatic vertical comb-drive actuators to work at resonant mode to scan a laser beam …

Location-and lesion-dependent estimation of mammographic background tissue complexity

A Avanaki, K Espig, T Kimpe - Journal of Medical Imaging, 2017 - spiedigitallibrary.org
We specify a notion of perceived background tissue complexity (BTC) that varies with lesion
shape, lesion size, and lesion location in the image. We propose four unsupervised BTC …

A large stroke magnetic fluid deformable mirror for focus control

L Min, Z Wu, M Huang, X Kong - Optoelectronics Letters, 2016 - Springer
A liquid deformable mirror, which can provide a large stroke deflection more than 100 μm, is
proposed for focus control. The deformable mirror utilizes the concept of magnetic fluid …

MEMS enabled control of light-sheet microscopy optical beam paths

S Bakas, D Uttamchandani… - … conference on Optical …, 2018 - ieeexplore.ieee.org
MEMS Enabled Control of Light-Sheet Microscopy Optical Beam Paths Page 1 Fig. 1.
Schematic of MEMS micromirrors for (a) light-sheet control using a 2D piezoelectric MEMS and …

MEMS Varifocal Mirror for High-Power Laser Focusing

AA Geraldes - 2019 - iris.univr.it
Today, lasers are used in many surgical procedures due to their ability of performing precise
incisions, and ablations. With the development of fiber-coupled lasers, even minimally …