Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)
A Anders - Journal of Applied Physics, 2017 - pubs.aip.org
High Power Impulse Magnetron Sputtering (HiPIMS) is a coating technology that combines
magnetron sputtering with pulsed power concepts. By applying power in pulses of high …
magnetron sputtering with pulsed power concepts. By applying power in pulses of high …
High power pulsed magnetron sputtering: A review on scientific and engineering state of the art
High power pulsed magnetron sputtering (HPPMS) is an emerging technology that has
gained substantial interest among academics and industrials alike. HPPMS, also known as …
gained substantial interest among academics and industrials alike. HPPMS, also known as …
Physics and technology of magnetron sputtering discharges
JT Gudmundsson - Plasma Sources Science and Technology, 2020 - iopscience.iop.org
Magnetron sputtering deposition has become the most widely used technique for deposition
of both metallic and compound thin films and is utilized in numerous industrial applications …
of both metallic and compound thin films and is utilized in numerous industrial applications …
Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017
JE Greene - Journal of Vacuum Science & Technology A, 2017 - pubs.aip.org
The use of thin films to enhance the physical and chemical properties of materials is
ubiquitous in today's world. Examples are shown in Fig. 1: copper metallization layers for …
ubiquitous in today's world. Examples are shown in Fig. 1: copper metallization layers for …
A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)
A Anders - Surface and Coatings Technology, 2014 - Elsevier
High power impulse magnetron sputtering (HiPIMS) has been at the center of attention over
the last years as it is an emerging physical vapor deposition (PVD) technology that …
the last years as it is an emerging physical vapor deposition (PVD) technology that …
An introduction to thin film processing using high-power impulse magnetron sputtering
D Lundin, K Sarakinos - Journal of Materials Research, 2012 - cambridge.org
High-power impulse magnetron sputtering (HiPIMS) is a promising sputtering-based ionized
physical vapor deposition technique and is already making its way to industrial applications …
physical vapor deposition technique and is already making its way to industrial applications …
Tutorial: Hysteresis during the reactive magnetron sputtering process
K Strijckmans, R Schelfhout, D Depla - Journal of Applied Physics, 2018 - pubs.aip.org
Reactive magnetron sputtering is a well-established physical vapor technique to deposit thin
compound films on different substrates, ranging from insulating glass windows over wear …
compound films on different substrates, ranging from insulating glass windows over wear …
Deposition rates of high power impulse magnetron sputtering: Physics and economics
A Anders - Journal of Vacuum Science & Technology A, 2010 - pubs.aip.org
Deposition by high power impulse magnetron sputtering (HIPIMS) is considered by some as
the new paradigm of advanced sputtering technology, yet this is met with skepticism by …
the new paradigm of advanced sputtering technology, yet this is met with skepticism by …
Magnetron sputtered titanium carbide-based coatings: A review of science and technology
Titanium carbide (TiC) coatings are widely used in several industrial applications, including
tooling and tribological applications. These materials are used due to their mechanical …
tooling and tribological applications. These materials are used due to their mechanical …
Plasma diagnostics for understanding the plasma–surface interaction in HiPIMS discharges: a review
N Britun, T Minea, S Konstantinidis… - Journal of Physics D …, 2014 - iopscience.iop.org
The physical and chemical aspects of plasma–surface interaction in high-power impulse
magnetron sputtering (HiPIMS) discharges are overviewed. The data obtained by various …
magnetron sputtering (HiPIMS) discharges are overviewed. The data obtained by various …