Toward Advanced High‐k and Electrode Thin Films for DRAM Capacitors via Atomic Layer Deposition

SE Kim, JY Sung, JD Jeon, SY Jang… - Advanced Materials …, 2023 - Wiley Online Library
Dynamic random access memories (DRAMs) are currently used as the core memory in
computing systems because of their high speed and density. Their demand should continue …

[HTML][HTML] Progress and perspective on different strategies to achieve wake-up-free ferroelectric hafnia and zirconia-based thin films

JPB Silva, KC Sekhar, RF Negrea… - Applied Materials …, 2022 - Elsevier
In the last decade orthorhombic hafnia and zirconia films have attracted tremendous
attention arising from the discovery of ferroelectricity at the nanoscale. However, an initial …

Unexpectedly low barrier of ferroelectric switching in HfO2 via topological domain walls

DH Choe, S Kim, T Moon, S Jo, H Bae, SG Nam… - Materials Today, 2021 - Elsevier
Fluorite-structure ferroelectrics—in particular the orthorhombic phase of HfO 2—are of
paramount interest to academia and industry because they show unprecedented scalability …

Comprehensive interpretations of thermodynamic and kinetic effects on the phase fractions in Hf1-xZrxO2 by first principle calculations

KH Ye, IW Yeu, G Han, T Jeong, S Yoon… - Applied Physics …, 2023 - pubs.aip.org
Comprehensive interpretations of thermodynamic and kinetic effects on the phase fractions
in Hf1-xZrxO2 by first principle calculations | Applied Physics Reviews | AIP Publishing Skip …

Epitaxial ferroelectric hafnia stabilized by symmetry constraints

T Zhu, S Deng, S Liu - Physical Review B, 2023 - APS
Ferroelectric memories experienced a revival in the last decade due to the discovery of
ferroelectricity in HfO 2-based nanometer-thick thin films. These films exhibit exceptional …

The effect of stress on HfO2-based ferroelectric thin films: A review of recent advances

R Han, P Hong, S Ning, Q Xu, M Bai, J Zhou… - Journal of Applied …, 2023 - pubs.aip.org
HfO 2-based thin films have raised considerable interest in ferroelectric memory devices due
to their thickness scalability and process compatibility with CMOS. Stress exhibits a …

Progress in computational understanding of ferroelectric mechanisms in HfO2

T Zhu, L Ma, S Deng, S Liu - npj Computational Materials, 2024 - nature.com
Since the first report of ferroelectricity in nanoscale HfO2-based thin films in 2011, this silicon-
compatible binary oxide has quickly garnered intense interest in academia and industry, and …

Local Epitaxial Templating Effects in Ferroelectric and Antiferroelectric ZrO2

K Chae, SF Lombardo, N Tasneem… - … Applied Materials & …, 2022 - ACS Publications
Nanoscale polycrystalline thin-film heterostructures are central to microelectronics, for
example, metals used as interconnects and high-K oxides used in dynamic random-access …

Superhigh energy storage density on-chip capacitors with ferroelectric Hf 0.5 Zr 0.5 O 2/antiferroelectric Hf 0.25 Zr 0.75 O 2 bilayer nanofilms fabricated by plasma …

Y He, G Zheng, X Wu, WJ Liu, DW Zhang… - Nanoscale …, 2022 - pubs.rsc.org
Thanks to their excellent compatibility with the complementary metal–oxide-semiconductor
(CMOS) process, antiferroelectric (AFE) HfO2/ZrO2-based thin films have emerged as …

Toward low-thermal-budget Hafnia-based ferroelectrics via atomic layer deposition

JH Kim, T Onaya, HR Park, YC Jung… - ACS Applied …, 2023 - ACS Publications
Since the first report of ferroelectricity in fluorite structure oxides a decade ago, significant
attention has been devoted to studying hafnia-based ferroelectric material systems due to …