This paper reports the application of zinc oxide (ZnO) in the pressure sensors that can be
integrated with a microelectromechanical system (MEMS). ZnO is one of the materials that …

Microcantilevers offer a wide range of applications in sensor and measurement technology.
In this work cantilever sensors are used as flow sensors. Most conventional flow sensors are …

Radio frequency sputtering technique was used to deposit high-quality Aluminium Nitride
(AlN) on a silicon substrate. Structural parameters of deposited thin film are analyzed and …

We report our experimental realization of fiber-cantilever beam-deflection magnetometer
using a series assembly of deflecting fiber-cantilevers for measuring low magnetic field (∼ …

We experimentally demonstrate a new method to determine the polarization properties of
piezoelectric nanocomposite materials using fiber-optic cantilever beam deflection principle …

This paper aims to study the analytical response of micro cantilever based gas sensor for the
quantification of NOx gas molecules, simultaneously discussing the possibility of a different …

In this paper, MEMS-based pressure sensor is designing using a parallel plate capacitor
which can be broadly applied in the electronic technology enhancement circles, increase in …

Thin-film pressure sensors have received widespread attention in recent times due to its
ease of manufacture, characterization, and fatigue strength. Commercial fabrication of these …