Ultraviolet-assisted low-thermal-budget-driven α-InGaZnO thin films for high-performance transistors and logic circuits
Y Zhang, G He, L Wang, W Wang, X Xu, W Liu - ACS nano, 2022 - ACS Publications
Developing a low-temperature fabrication strategy of an amorphous InGaZnO (α-IGZO)
channel layer is a prerequisite for high-performance oxide-based thin film transistor (TFT) …
channel layer is a prerequisite for high-performance oxide-based thin film transistor (TFT) …
High‐performance vacuum‐processed metal oxide thin‐film transistors: a review of recent developments
Since 2010, vacuum‐processed oxide semiconductors have greatly improved with the
publication of more than 1,300 related papers. Although the number of researches on oxide …
publication of more than 1,300 related papers. Although the number of researches on oxide …
Aqueous-solution-driven HfGdOx gate dielectrics for low-voltage-operated α-InGaZnO transistors and inverter circuits
Y Zhang, G He, W Wang, B Yang, C Zhang… - Journal of Materials …, 2020 - Elsevier
In this work, a non-toxic and environmentally friendly aqueous-solution-based method has
been adopted to prepare gadolinium-doped hafnium oxide (HfO 2) gate dielectric thin films …
been adopted to prepare gadolinium-doped hafnium oxide (HfO 2) gate dielectric thin films …
In-situ Ar plasma treatment as a low thermal budget technique for high performance InGaSnO thin film transistors fabricated using magnetron sputtering
M Hu, L Xu, X Zhang, Z Song, S Luo - Applied Surface Science, 2022 - Elsevier
High-performance InGaSnO thin film transistors are successfully fabricated with a reduced
thermal budget by an in-situ Ar plasma treatment process. This process does not require …
thermal budget by an in-situ Ar plasma treatment process. This process does not require …
Balanced Performance Improvement of a-InGaZnO Thin-Film Transistors Using ALD-Derived Al2O3-Passivated High-k HfGdOx Dielectrics
Y Zhang, Y Lin, G He, B Ge, W Liu - ACS Applied Electronic …, 2020 - ACS Publications
High-speed operation and low-power-consumption requirements have accelerated the
development of thin-film transistors (TFTs) with exploration of gate dielectrics. In this work …
development of thin-film transistors (TFTs) with exploration of gate dielectrics. In this work …
Investigation on energy bandgap states of amorphous SiZnSnO thin films
The variation in energy bandgaps of amorphous oxide semiconducting SiZnSnO (a-SZTO)
has been investigated by controlling the oxygen partial pressure (O p). The systematic …
has been investigated by controlling the oxygen partial pressure (O p). The systematic …
Influence of precursor purge time on the performance of ZnO TFTs fabricated by atomic layer deposition
X Chen, J Wan, L Ji, J Gao, H Wu, C Liu - Vacuum, 2022 - Elsevier
In the present work, the impact of purge time on the performance of TFTs was systematically
studied because both ZnO channel layers and Al 2 O 3 insulators were deposited using …
studied because both ZnO channel layers and Al 2 O 3 insulators were deposited using …
Monolithic n‐Type Metal–Oxide–Semiconductor Inverter Integrated Circuits Based on Wide and Ultrawide Bandgap Semiconductors
Wide bandgap (WBG) and ultrawide bandgap (UWBG) semiconductors in n‐type metal–
oxide–semiconductor (n‐MOS) integrated circuits (ICs) are increasingly being explored for …
oxide–semiconductor (n‐MOS) integrated circuits (ICs) are increasingly being explored for …
Systematic Study on the Amorphous, C-Axis-Aligned Crystalline, and Protocrystalline Phases in In–Ga–Zn Oxide Thin-Film Transistors
AV Glushkova, HFW Dekkers, M Nag… - ACS Applied …, 2021 - ACS Publications
In an effort to fabricate In–Ga–Zn oxide (IGZO) thin-film transistors (TFTs) that combine high
performance and high stability, we optimize sputtering conditions to create devices based on …
performance and high stability, we optimize sputtering conditions to create devices based on …
Room temperature fabricated high performance IAZO thin film transistors with dual-active-layer structure and sputtered Ta2O5 gate insulator
W Xu, G Zhang, X Feng - Journal of Alloys and Compounds, 2021 - Elsevier
The room temperature fabrication of amorphous oxide semiconductor thin film transistors
(TFTs) is essential for their applications in flexible electronics due to the low glass-transition …
(TFTs) is essential for their applications in flexible electronics due to the low glass-transition …