Ultraviolet-assisted low-thermal-budget-driven α-InGaZnO thin films for high-performance transistors and logic circuits

Y Zhang, G He, L Wang, W Wang, X Xu, W Liu - ACS nano, 2022 - ACS Publications
Developing a low-temperature fabrication strategy of an amorphous InGaZnO (α-IGZO)
channel layer is a prerequisite for high-performance oxide-based thin film transistor (TFT) …

High‐performance vacuum‐processed metal oxide thin‐film transistors: a review of recent developments

HJ Kim, K Park, HJ Kim - Journal of the Society for Information …, 2020 - Wiley Online Library
Since 2010, vacuum‐processed oxide semiconductors have greatly improved with the
publication of more than 1,300 related papers. Although the number of researches on oxide …

Aqueous-solution-driven HfGdOx gate dielectrics for low-voltage-operated α-InGaZnO transistors and inverter circuits

Y Zhang, G He, W Wang, B Yang, C Zhang… - Journal of Materials …, 2020 - Elsevier
In this work, a non-toxic and environmentally friendly aqueous-solution-based method has
been adopted to prepare gadolinium-doped hafnium oxide (HfO 2) gate dielectric thin films …

In-situ Ar plasma treatment as a low thermal budget technique for high performance InGaSnO thin film transistors fabricated using magnetron sputtering

M Hu, L Xu, X Zhang, Z Song, S Luo - Applied Surface Science, 2022 - Elsevier
High-performance InGaSnO thin film transistors are successfully fabricated with a reduced
thermal budget by an in-situ Ar plasma treatment process. This process does not require …

Balanced Performance Improvement of a-InGaZnO Thin-Film Transistors Using ALD-Derived Al2O3-Passivated High-k HfGdOx Dielectrics

Y Zhang, Y Lin, G He, B Ge, W Liu - ACS Applied Electronic …, 2020 - ACS Publications
High-speed operation and low-power-consumption requirements have accelerated the
development of thin-film transistors (TFTs) with exploration of gate dielectrics. In this work …

Investigation on energy bandgap states of amorphous SiZnSnO thin films

BH Lee, KS Cho, DY Lee, A Sohn, JY Lee, H Choo… - Scientific reports, 2019 - nature.com
The variation in energy bandgaps of amorphous oxide semiconducting SiZnSnO (a-SZTO)
has been investigated by controlling the oxygen partial pressure (O p). The systematic …

Influence of precursor purge time on the performance of ZnO TFTs fabricated by atomic layer deposition

X Chen, J Wan, L Ji, J Gao, H Wu, C Liu - Vacuum, 2022 - Elsevier
In the present work, the impact of purge time on the performance of TFTs was systematically
studied because both ZnO channel layers and Al 2 O 3 insulators were deposited using …

Monolithic n‐Type Metal–Oxide–Semiconductor Inverter Integrated Circuits Based on Wide and Ultrawide Bandgap Semiconductors

D Chettri, G Mainali, N Xiao, X Tang… - physica status solidi (b …, 2024 - Wiley Online Library
Wide bandgap (WBG) and ultrawide bandgap (UWBG) semiconductors in n‐type metal–
oxide–semiconductor (n‐MOS) integrated circuits (ICs) are increasingly being explored for …

Systematic Study on the Amorphous, C-Axis-Aligned Crystalline, and Protocrystalline Phases in In–Ga–Zn Oxide Thin-Film Transistors

AV Glushkova, HFW Dekkers, M Nag… - ACS Applied …, 2021 - ACS Publications
In an effort to fabricate In–Ga–Zn oxide (IGZO) thin-film transistors (TFTs) that combine high
performance and high stability, we optimize sputtering conditions to create devices based on …

Room temperature fabricated high performance IAZO thin film transistors with dual-active-layer structure and sputtered Ta2O5 gate insulator

W Xu, G Zhang, X Feng - Journal of Alloys and Compounds, 2021 - Elsevier
The room temperature fabrication of amorphous oxide semiconductor thin film transistors
(TFTs) is essential for their applications in flexible electronics due to the low glass-transition …