The Characterization and Passivation of Fixed Oxide Charges and Interface States in the MOS System

PK Hurley, É O'Connor, V Djara… - … on Device and …, 2013 - ieeexplore.ieee.org
In this paper, we present a review of experimental results examining charged defect
components in the Al 2 O 3/In 0.53 Ga 0.47 As metal-oxide-semiconductor (MOS) system …

Molecular and Atomic Layer Deposition of Hybrid Polyimide–Al2O3 Gate Dielectrics for Flexible Electronic Devices

J Wang, Q Huang, Y Gao, N Shi, Q Ge… - Chemistry of …, 2022 - ACS Publications
Modern information technologies have tremendous demands on flexible electronic devices
such as thin-film transistors (TFTs). As the flexible TFT technology continues to advance, the …

Improved integration of ultra-thin high-k dielectrics in few-layer MoS2 FET by remote forming gas plasma pretreatment

X Wang, TB Zhang, W Yang, H Zhu, L Chen… - Applied Physics …, 2017 - pubs.aip.org
The effective and high-quality integration of high-k dielectrics on two-dimensional (2D)
crystals is essential to the device structure engineering and performance improvement of …

An investigation of capacitance-voltage hysteresis in metal/high-k/In0. 53Ga0. 47As metal-oxide-semiconductor capacitors

J Lin, YY Gomeniuk, S Monaghan, IM Povey… - Journal of Applied …, 2013 - pubs.aip.org
In this work, we present the results of an investigation into charge trapping in metal/high-k/In
0.53 Ga 0.47 As metal-oxide-semiconductor capacitors (MOS capacitors), which is analysed …

The physical origin of dispersion in accumulation in InGaAs based metal oxide semiconductor gate stacks

I Krylov, D Ritter, M Eizenberg - Journal of Applied Physics, 2015 - pubs.aip.org
Dispersion in accumulation is a widely observed phenomenon in technologically important
InGaAs gate stacks. Two principal different interface defects were proposed as the physical …

Integrated all‐optical switch with 10 ps time resolution enabled by ALD

G Moille, S Combrié, L Morgenroth… - Laser & Photonics …, 2016 - Wiley Online Library
The potential of GaAs‐based photonic crystals for fast all‐optical switching in the telecom
spectral range is exploited by controlling the surface recombination and, thereby, the carrier …

Observation of Si 2p Core‐Level Shift in Si/High‐κ Dielectric Interfaces Containing a Negative Charge

J Lehtiö, ZJ Rad, S Granroth, M Yasir… - Advanced Electronic …, 2021 - Wiley Online Library
Negative static charge and induced internal electric field have often been observed in the
interfaces between silicon and high‐κ dielectrics, for example Al2O3 and HfO2. The electric …

Oxide Charge Engineering of Atomic Layer Deposited AlOxNy/Al2O3 Gate Dielectrics: A Path to Enhancement Mode GaN Devices

MA Negara, M Kitano, RD Long… - ACS applied materials & …, 2016 - ACS Publications
Nitrogen incorporation to produce negative fixed charge in Al2O3 gate insulator layers is
investigated as a path to achieve enhancement mode GaN device operation. A uniform …

Effects of In-Situ Plasma-Enhanced Atomic Layer Deposition Treatment on the Performance of HfO2/In0.53Ga0.47As Metal–Oxide–Semiconductor Field-Effect …

QH Luc, SP Cheng, PC Chang, HB Do… - IEEE Electron …, 2016 - ieeexplore.ieee.org
In-situ plasma-enhanced atomic layer deposition (PEALD) technique was employed for
device passivation to realize a high-performance inversion-mode HfO 2/In 0.53 Ga 0.47 As …

Improving the breakdown voltage, ON-resistance and gate-charge of InGaAs LDMOS power transistors

MJ Kumar, A Bansal - Semiconductor Science and Technology, 2012 - iopscience.iop.org
Recently, a lateral double-diffused metal-oxide-semiconductor (LDMOS) using In 0.53 Ga
0.47 As having an extended-p+(ep+) body has been shown to be better than a conventional …