Silane flow rate dependence of SiO x cap layer induced impurity‐free intermixing of GaAs/AlGaAs quantum wells

PNK Deenapanray, HH Tan, MI Cohen… - Journal of The …, 2000 - iopscience.iop.org
Results Effect of silane flow rate on QW intermixing.—Figure 1a illustrates typical PL spectra
of capped (solid line) and uncapped (dotted line) QW structures after RTA at 950C. In this …

Native defect engineering of interdiffusion using thermally grown oxides of GaAs

RM Cohen, G Li, C Jagadish, PT Burke, M Gal - Applied physics letters, 1998 - pubs.aip.org
Interdiffusion can be either increased or decreased when annealing epitaxial layers covered
by an oxide of GaAs. AlGaAs/GaAs quantum wells (QWs) of different widths were grown by …

Influence of dielectric deposition parameters on the quantum well intermixing by impurity-free vacancy disordering

JS Yu, JD Song, YT Lee, H Lim - Journal of applied physics, 2002 - pubs.aip.org
We investigated the influence of the deposition parameters of SiO x and SiN x capping
layers in the plasma-enhanced chemical vapor deposition on the band gap energy shift of …

Dependence of dielectric-cap quantum-well disordering of GaAs-AlGaAs quantum-well structure on the hydrogen content in SiN/sub x/capping layer

J Choi, SM Han, SI Shah, SG Choi… - IEEE Journal of …, 1998 - ieeexplore.ieee.org
Dielectric-cap quantum-well disordering of GaAs-AlGaAs multiple-quantum-well (MQW)
structure was carried out using SiN/sub x/capping layer grown by plasma enhanced …

Impurity-free intermixing of GaAs/AlGaAs quantum wells using capping: Effect of nitrous oxide flow rate

PNK Deenapanray, C Jagadish - … of Vacuum Science & Technology B …, 2001 - pubs.aip.org
In this work, impurity-free interdiffusion of GaAs/AlGaAs quantum wells was investigated as a
function of the quality of SiO x capping layers grown by plasma-enhanced chemical vapor …

Impurity-free quantum well intermixing for large optical cavity high-power laser diode structures

A Kahraman, E Gür, A Aydınlı - Semiconductor Science and …, 2016 - iopscience.iop.org
We report on the correlation of atomic concentration profiles of diffusing species with the
blueshift of the quantum well luminescence from both as-grown and impurity free quantum …

Dependence of the intermixing in InGaAs/InGaAsP quantum well on capping layers

WJ Choi, HT Yi, JI Lee, DH Woo - Journal of the Korean Physical …, 2004 - inis.iaea.org
[en] The dependence of impurity-free vacancy disordering (IFVD) of InGaAs/InGaAsP
quantum well (QW) structure with various semiconductor capping layers over the QW …

[PDF][PDF] Enhanced disordering of GaAs/AIGaAs multiple quantum well by rapid thermal annealing using plasma enhanced chemical vapour deposited SiN capping …

WJ Choi, JI Lee, IK Han, KN Kang, Y Kim… - Journal of materials …, 1994 - researchgate.net
The multiple quantum well (MQW) structure is a good candidate to monolithically integrate
lasers and waveguides for realizing photonic integrated circuits. For such an application …

Fabrication of multi-wavelength In0.2Ga0.8As/GaAs multiple quantum well laser diodes by area-selective impurity-free vacancy disordering using SiOx capping …

JS Yu, JD Song, YT Lee, H Lim - Applied Physics A, 2005 - Springer
This work studied the implementation of multi-wavelength laser diodes on a single substrate
through the position-dependent bandgap modification of the In 0.2 Ga 0.8 As/GaAs multiple …

[图书][B] Semiconductor Quantum Well Intermixing: Material Properties and Optoelectronic Applications

JT Lie - 2000 - taylorfrancis.com
Semiconductor Quantum Well Intermixing is an international collection of research results
dealing with several aspects of the diffused quantum well (DFQW), ranging from Physics to …