Remote epitaxy

H Kim, CS Chang, S Lee, J Jiang, J Jeong… - Nature Reviews …, 2022 - nature.com
Remote epitaxy is an emerging technology for producing single-crystalline, free-standing
thin films and structures. The method uses 2D van der Waals materials as semi-transparent …

Understanding the 2D-material and substrate interaction during epitaxial growth towards successful remote epitaxy: a review

J Ji, HM Kwak, J Yu, S Park, JH Park, H Kim, S Kim… - Nano …, 2023 - Springer
Remote epitaxy, which was discovered and reported in 2017, has seen a surge of interest in
recent years. Although the technology seemed to be difficult to reproduce by other labs at …

High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process

H Kim, Y Liu, K Lu, CS Chang, D Sung, M Akl… - Nature …, 2023 - nature.com
Layer transfer techniques have been extensively explored for semiconductor device
fabrication as a path to reduce costs and to form heterogeneously integrated devices. These …

Remote epitaxial interaction through graphene

CS Chang, KS Kim, BI Park, J Choi, H Kim, J Jeong… - Science …, 2023 - science.org
The concept of remote epitaxy involves a two-dimensional van der Waals layer covering the
substrate surface, which still enable adatoms to follow the atomic motif of the underlying …

Remote heteroepitaxy of GaN microrod heterostructures for deformable light-emitting diodes and wafer recycle

J Jeong, Q Wang, J Cha, DK Jin, DH Shin, S Kwon… - Science …, 2020 - science.org
There have been rapidly increasing demands for flexible lighting apparatus, and micrometer-
scale light-emitting diodes (LEDs) are regarded as one of the promising lighting sources for …

Graphene buffer layer on SiC as a release layer for high-quality freestanding semiconductor membranes

K Qiao, Y Liu, C Kim, RJ Molnar, T Osadchy, W Li… - Nano …, 2021 - ACS Publications
Free-standing crystalline membranes are highly desirable owing to recent developments in
heterogeneous integration of dissimilar materials. Van der Waals (vdW) epitaxy enables the …

[HTML][HTML] Two-dimensional material templates for van der Waals epitaxy, remote epitaxy, and intercalation growth

H Ryu, H Park, JH Kim, F Ren, J Kim, GH Lee… - Applied Physics …, 2022 - pubs.aip.org
Epitaxial growth, a crystallographically oriented growth induced by the chemical bonding
between crystalline substrate and atomic building blocks, has been a key technique in the …

Long-Range Orbital Hybridization in Remote Epitaxy: The Nucleation Mechanism of GaN on Different Substrates via Single-Layer Graphene

Y Qu, Y Xu, B Cao, Y Wang, J Wang… - ACS Applied Materials …, 2022 - ACS Publications
Remote epitaxy is a very promising technique for the preparation of single-crystal thin films
of flexibly transferred III–V group semiconductors. However, the epilayer nucleation …

Exceptional Thermochemical Stability of Graphene on N-Polar GaN for Remote Epitaxy

J Choi, J Jeong, X Zhu, J Kim, BK Kang, Q Wang… - ACS …, 2023 - ACS Publications
In this study, we investigate the thermochemical stability of graphene on the GaN substrate
for metal–organic chemical vapor deposition (MOCVD)-based remote epitaxy. Despite …

Recent Advances in Mechanically Transferable III‐Nitride Based on 2D Buffer Strategy

W Song, Q Chen, K Yang, M Liang, X Yi… - Advanced Functional …, 2023 - Wiley Online Library
Group III‐nitrides have attracted significant attention in recent years for their wide tunable
band‐gaps and excellent optoelectronic capabilities, which are advantageous for several …