Selective area regrowth and doping for vertical gallium nitride power devices: Materials challenges and recent progress

H Fu, K Fu, C Yang, H Liu, KA Hatch, P Peri… - Materials Today, 2021 - Elsevier
This paper reviews materials challenges and recent progress for selective area regrowth
and doping for vertical gallium nitride (GaN) power devices. The purpose is to realize …

Selective area doping of GaN towards high-power applications

RA Ferreyra, B Li, S Wang, J Han - Journal of Physics D: Applied …, 2023 - iopscience.iop.org
Selective area doping in GaN, especially p-type, is a critical and inevitable building block for
&# xD; the realization of advanced device structures for high-power applications, including …

Unveiling the influence of selective-area-regrowth interfaces on local electronic properties of GaN pn junctions for efficient power devices

AS Chang, B Li, S Wang, S Frisone, RS Goldman… - Nano Energy, 2022 - Elsevier
We report correlated nanoscale mapping of the structure, composition, and properties of
regrown GaN pn junctions to identify how etching and non-planar regrowth processes limit …

[HTML][HTML] Computational Fermi level engineering and doping-type conversion of Mg: Ga2O3 via three-step synthesis process

A Goyal, A Zakutayev, V Stevanović… - Journal of Applied Physics, 2021 - pubs.aip.org
Gallium oxide (Ga 2 O 3) is being actively explored for electronics that can operate at high
power, temperature, and frequency as well as for deep-ultraviolet optoelectronics and other …

Morphology control and crystalline quality of p-type GaN shells grown on coaxial GaInN/GaN multiple quantum shell nanowires

W Lu, N Nakayama, K Ito, S Katsuro… - … Applied Materials & …, 2021 - ACS Publications
The morphology and crystalline quality of p-GaN shells on coaxial GaInN/GaN multiple
quantum shell (MQS) nanowires (NWs) were investigated using metal–organic chemical …

Etched-and-regrown GaN P–N diodes with low-defect interfaces prepared by in situ TBCl etching

B Li, S Wang, M Nami, AM Armstrong… - ACS Applied Materials & …, 2021 - ACS Publications
The ability to form pristine interfaces after etching and regrowth of GaN is a prerequisite for
epitaxial selective area doping, which in turn is needed for the formation of lateral PN …

Investigation of vertical GaN-on-GaN p–n diode with regrown p-GaN for operation in Venus and other extreme environments

S Luo, K Fu, Q Xie, M Yuan, G Gao, H Guo… - Applied Physics …, 2023 - pubs.aip.org
This Letter reports the performance of vertical GaN-on-GaN p–n diodes with etch-then-
regrown p-GaN after exposure to a simulated Venus environment (460 C, $94 bar …

Selective area doping in gallium nitride: a retrospective of the ARPA-E PNDIODES program

IC Kizilyalli, EP Carlson - ECS Transactions, 2021 - iopscience.iop.org
As silicon-based semiconductors are fast approaching their performance limits for high
power requirements, wide-bandgap semiconductors such as gallium nitride (GaN) and …

[HTML][HTML] Impact of growth parameters on the background doping of GaN films grown by ammonia and plasma-assisted molecular beam epitaxy for high-voltage vertical …

J Wang, KF Jorgensen, E Farzana, KS Qwah… - APL Materials, 2021 - pubs.aip.org
We report on ammonia and plasma-assisted molecular beam epitaxy (NH 3-MBE and
PAMBE) grown GaN layers with a low net carrier concentration (N net). Growth parameters …

Selective area etching and doping of GaN for high-power applications

B Li, S Wang, AS Chang, L Lauhon, Y Liu… - ECS …, 2021 - iopscience.iop.org
Selective area doping (SAD) of gallium nitride (GaN), especially p-type doping, is desirable
for high-power applications but yet challenging. The lack of this process greatly limits the …