This article presents a single-chip accelerometer with the best reported thermal noise and
the lowest bias instability among state-of-the-art accelerometers with high-(1000) sensing …

Sensing the acceleration with high dynamic range follows space and size limitations and
many errors and inconveniences caused by using multiple accelerometers on a single …

With the miniaturization of inertial instruments, sensors mounted inside are vulnerable to
interference. In a complex thermal transmission environment, temperature drift is the main …

The tasks of electrical micro-and nanoprobing require precision that goes beyond human
perception and therefore, depend on sensors providing real-time feedback. Efforts towards …

To achieve the intelligentization and miniaturization goals of high-g acceleration sensors,
this paper proposes a super high-g accelerometer using ASIC (Application-Specific …

This article presents a triaxial microelectromechanical system (MEMS) capacitive
accelerometer using a high-voltage biasing technique to achieve high resolution with …

This article presents a 16-bit wide-bandwidth (BW) high-performance (HP) three-axis micro-
electromechanical system (MEMS) accelerometer readout application-specific integrated …

A single accelerometer with limited performance often struggles to meet the increasingly
complex demands of vibration measurement. Complementarity among various …

This paper reports on the development of a monolithic capacitive accelerometer array
system that has a designed full-scale range of, a bandwidth larger than 10, with a minimum …

In this article, we propose an autocalibration method to cancel out the mismatch between the
sensing capacitors in differential capacitive sensors. The proposed autocalibration logic is …