Improving the working distance for near-field lithography with supercell photonic crystal
W Zhang, X Li, Z Wen, Y Zhou, J Xiang, G Chen… - Optics …, 2024 - Elsevier
Near-field lithography technology plays a vital role in chip manufacturing. However, near-
field lithography devices with acceptable working distance (WD) have become a long-term …
field lithography devices with acceptable working distance (WD) have become a long-term …