Tent-plate AlN PMUT with a piston-like shape under liquid operation

E Ledesma, I Zamora, A Uranga… - IEEE Sensors …, 2020 - ieeexplore.ieee.org
In this work, a waterproof tent-plate piezoelectric micromachined ultrasonic transducer
(PMUT) with enhanced performance as actuator and sensor in comparison with standard …

High-Q Support Transducer MEMS Resonators Enabled Low-Phase-Noise Oscillators

HT Jen, G Pillai, SI Liu, SS Li - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
Structural and electrode material engineering methodology to attain quality factor
enhancement in a support transducer enabled Wine-glass and Lamé mode resonator has …

Multielement ring array based on minute size PMUTs for high acoustic pressure and tunable focus depth

E Ledesma, I Zamora, A Uranga, N Barniol - Sensors, 2021 - mdpi.com
This paper presents a multielement annular ring ultrasound transducer formed by individual
high-frequency PMUTs (17.5 MHz in air and 8.7 MHz in liquid) intended for high-precision …

Transducer arrays for 3D ultrasound computed tomography

M Angerer - 2022 - publikationen.bibliothek.kit.edu
Die Ultraschall-Computertomographie (USCT) ist ein vielversprechendes medizinisches
Bildgebungsverfahren zur Früherkennung von Brustkrebs. Am Karlsruher Institut für …

[HTML][HTML] On the Dynamics of a Novel Liquid-Coupled Piezoelectric Micromachined Ultrasonic Transducer Designed to Have a Reduced Resonant Frequency and …

S Sammut, E Gatt, RP Borg - Micromachines, 2024 - mdpi.com
This paper introduces a novel design for a liquid-deployed Piezoelectric Micromachined
Ultrasonic Transducer (PMUT). This design was specifically developed to resonate at a …