AFM probe with the U-shaped cross-sectional cantilever for measuring the ultra-low coefficient of friction of 10−6

Y Chen, L Jiang, L Qian - Friction, 2024 - Springer
Accurately measuring the coefficient of friction (COF) is the fundamental prerequisite of
superlubricity research. This study aimed to reduce the COF measurement resolution Δ μ of …

Modal Analysis of a Single‐Structure Multiaxis MEMS Gyroscope

MA Shah, F Iqbal, IA Shah, B Lee - Journal of Sensors, 2016 - Wiley Online Library
This paper reports on designing a single‐structure triaxes MEMS capacitive gyroscope
which is capable of measuring the three angular velocities on a single drive. AZ‐shaped …

[PDF][PDF] Time Efficient Evaluation of Multi-axis MEMS Gyroscope Using Three-dimensional Test Methodology

F Iqbal, H Din, B Lee - JOURNAL OF Semiconductor Technology …, 2019 - researchgate.net
Recently, the demand for microelectromechanical systems (MEMS) based inertial sensors
has been increased due to a wide range of application in consumer electronics; however …

[PDF][PDF] Research Article Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope

MA Shah, F Iqbal, IA Shah, B Lee - 2016 - academia.edu
This paper reports on designing a single-structure triaxes MEMS capacitive gyroscope
which is capable of measuring the three angular velocities on a single drive. A Z-shaped …