Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …

A robotic cluster tool involves many activities whose time is subject to some disturbance,
thus leading to the activity time variation. It results in wafer sojourn time fluctuation in a …

Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster
tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling …

Due to the trends of larger wafer diameters and smaller lot sizes, cluster tools need to switch
from processing one lot of wafers to another frequently. This leads to more transient periods …

To satisfy the requirements of high-mix integrated-circuit chip production, multiple wafer
types are grouped into a lot to be fabricated concurrently in a multi-cluster tool system …

In today's semiconductor manufacturing industry, wafer foundries often face the challenge of
producing a variety of integrated circuit chip products using a single manufacturing line. To …

A cluster tool, widely used for semiconductor wafer fabrication, consists of several single-
wafer processing chambers and a wafer handling robot. A chamber for critical processes is …

The trends of increasing wafer diameter and smaller lot sizes have led to more transient
periods in wafer fabrication. For some wafer fabrication processes, such as atomic layer …

Nowadays, cluster tools tend to concurrently process multiple types of wafers with similar
recipes in order to improve their utilization and flexibility in semiconductor manufacturing …