In this study, we sought to enhance the cutting properties of the various blades by coating
them with Zr-and Fe-based thin film metallic glasses (TFMGs) to a thickness of 234–255 nm …

Thin film metallic glasses (TFMGs) represent a class of promising engineering materials for
structural applications. Despite the effort that has been made in the development of TFMG …

We report on the development of MEMS current sensors composed of Fe 67.5 B 22.5 Nd 6.3
Nb 3.7 (FBNN) magnetic metallic glass thin films. These current sensors are based on free …

Our previous strategy was further used to design an amorphous structure with exceptional
thermal stability. Si x NbTaTiZr (x= 0, 1) thin films were investigated on amorphous structure …

In the present study, we investigate the mechanical properties, residual stress, and
microprocessing compatibility of Fe 67.5 B 22.5 Nd 6.3 Nb 3.7 metallic glass thin films (Fe …

In this work, an electrostatic comb-drive micro-mirror with the Pd-based metallic glass torsion
bar and the self-aligned structures was proposed and developed. The self-aligned structure …

抄録 In the field of microelectromechanical systems, there is research trend to find alternative
materials to silicon which sometimes struggles with low resistance to crack propagation and …