MEMS Pressure Sensors Design, Simulation, Manufacturing, Interface Circuits: A Review
AT Tulaev, AS Kozlov, JV Belyaev… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
This article deals with the fabrication techno-logies and design techniques of pressure
sensors using various sensing element (SE) materials. The comparative analysis of different …
sensors using various sensing element (SE) materials. The comparative analysis of different …