A Review on Development and Optimization of Microheaters for High-Temperature In Situ Studies

RG Spruit, JT Van Omme… - Journal of …, 2017 - ieeexplore.ieee.org
Microelectromechanical systems (MEMS)-based sample carriers became a breakthrough for
in situ inspection techniques, especially in transmission electron microscopy where the …

Graphene Microheater Chips for In Situ TEM

J Zhao, L Liang, S Tang, G Zhang, Y Su, Y Zhao… - Nano Letters, 2022 - ACS Publications
Low-dimensional materials are bringing significant innovations to in situ TEM
characterization. Here a new graphene microheater chip for TEM was developed by …

Advanced microheater for in situ transmission electron microscopy; enabling unexplored analytical studies and extreme spatial stability

JT van Omme, M Zakhozheva, RG Spruit, M Sholkina… - Ultramicroscopy, 2018 - Elsevier
In this work we present our advanced in situ heating sample carrier for transmission electron
microscopy (TEM). The TEM is a powerful tool for materials characterization, especially …

System-on-chip SMO gas sensor integration in advanced CMOS technology

L Filipovic, A Lahlalia - Journal of The Electrochemical Society, 2018 - iopscience.iop.org
The growing demand for the integration of functionalities on a single device is peaking with
the rise of IoT. We are near to having multiple sensors in portable and wearable …

Microheater Chips with Carbon Nanotube Resistors

Z Zhao, J Zhao, L Liang, Y Zhou, Z Mei… - … Applied Materials & …, 2024 - ACS Publications
The specific and excellent properties of the low-dimensional nanomaterials have made them
promising building blocks to be integrated into microelectromechanical systems with high …

Versatile Homebuilt Gas Feed and Analysis System for Operando TEM of Catalysts at Work

M Plodinec, HC Nerl, R Farra… - Microscopy and …, 2020 - academic.oup.com
Understanding how catalysts work during chemical reactions is crucial when developing
efficient catalytic materials. The dynamic processes involved are extremely sensitive to …

[HTML][HTML] Theoretical examination of thermo-migration in novel platinum microheaters

L Filipovic - Microelectronics Reliability, 2021 - Elsevier
Conductometric gas sensors based on SMO films must be heated to temperatures up to
550° C in order to initiate the molecular adsorption process at the SMO film's surface. Very …

MEMS‐based nanoreactor for in situ analysis of solid–gas interactions inside the transmission electron microscope

HH Pérez Garza, D Morsink, J Xu… - Micro & Nano …, 2017 - Wiley Online Library
A nanoreactor‐based system for in situ analysis of solid–gas interactions inside the
transmission electron microscope, referred to as the 'climate system', is introduced here. The …

The “Climate” system: Nano-Reactor for in-situ analysis of solid-gas interactions inside the TEM

HH Pérez-Garza, D Morsink, J Xu… - 2016 IEEE 11th …, 2016 - ieeexplore.ieee.org
We present the development of a Nano-Reactor for in-situ studies of solid-gas interactions
inside the Transmission Electron Microscope (TEM). This MEMS-based device acts as a …

Reliability and stability of MEMS microheaters for gas sensors

L Filipovic - 2021 IEEE International Integrated Reliability …, 2021 - ieeexplore.ieee.org
Before fabrication, sensors first must be designed, simulated, and optimized using modeling
and simulation tools in order to reduce the manufacturing costs associated with the …