Over the last two decades, piezoelectric resonant sensors based on micro-
electromechanical systems (MEMS) technologies have been extensively studied as such …

This paper is devoted to a detailed analysis of the appearance of frequency combs in the
dynamics of a micro-electro-mechanical systems (MEMS) resonator featuring 1: 2 internal …

In this paper, we analyze possible sources of dissipation in aluminium nitride (AlN) contour
mode resonators for three different resonance frequency devices (fr)(220 MHz, 370 MHz …

The resonance characteristics of vibrating structures change when they are immersed in
fluids and these changes can be related to the parameters density and viscosity of …

The quality factor of a resonator represents the decay of vibrational energy over time, and is
directly related to the frequency response and other key parameters that determine …

The explosive development of wireless and mobile communication systems has
continuously driven rapid technology innovation in component performance and system …

High-frequency mechanical resonators subjected to low thermal phonon occupancy are
easier to be prepared to the ground state by direct cryogenic cooling. Their extreme stiffness …

This paper experimentally verifies the impact of thermoelastic damping (TED) in metal
electrodes on the quality factor (Q ted) of 1 GHz Aluminum Nitride (AlN) contour mode …

A capacitive-piezoelectric (also known as, capacitive-piezo) transducer that combines the
strengths of capacitive and piezoelectric mechanisms to achieve a combination of …

This paper presents the design, fabrication, and characterization of cantilever-type
resonators with a novel stacked structure. Aluminum nitride is adopted as the material for …