This review paper covers a topic of significant importance in micro-and nano-systems
development and manufacturing, specifically the residual stresses in deposited thin-film …

Structured optical materials create new computing paradigms using photons, with
transformative impact on various fields, including machine learning, computer vision …

This paper presents the fabrication and characterization of a curved-up piezoresistive
microcantilever flow sensor. The microcantilever sensor, fabricated with silicon-on-insulator …

Siloxane-based polymer films obtained by the sol–gel process are often porous and exhibit
low refractive indices. To address this issue, we have prepared two intrinsic high refractive …

A brief introduction to the issues related to the mechanical properties of MEMS components
in terms of their functionality, types of loading and modes of operation is presented. At the …

Using the Stoney formula and its modifications, curvature-based techniques are gaining
increasingly widespread application in evaluating the stress in a film on a substrate. In …

Massive irreversible increases in tensile stress (up to 2 GPa) on thermal cycling are
demonstrated for plasma-enhanced chemical vapor deposited (PECVD) silicon nitride films …

Wafer level thin-film residual stress characterization is crucial for the structural reliability of
many semiconductor and microelectromechanical systems (MEMS) devices. Because of its …

This paper reports a piezoelectric zinc oxide (ZnO) based acoustic sensor for high sound
pressure level (SPL) with wide bandwidth for audio and aeroacoustic applications. The …

This paper discusses thermo-mechanical behavior of plasma-enhanced chemical vapor
deposited oxide films during and after post-deposition thermal cycling and annealing. A …