Hydrogen-terminated diamond surfaces and interfaces

H Kawarada - Surface Science Reports, 1996 - Elsevier
Surfaces and interfaces of hydrogen-terminated diamonds are reviewed. The control and
preparation of diamond surfaces have been greatly advanced by the recent progress in …

Scalable production and supply chain of diamond wafers using microwave plasma: A mini-review

SV Baryshev, M Muehle - IEEE Transactions on Plasma …, 2023 - ieeexplore.ieee.org
Discovered and reported exactly 40 years ago, microwave plasma-assisted chemical vapor
deposition (MPACVD) pointed out an economic technology that could potentially produce …

Heteroepitaxial growth of highly oriented diamond on cubic silicon carbide

H Kawarada, C Wild, N Herres, R Locher… - Journal of applied …, 1997 - pubs.aip.org
We have deposited epitaxial diamond films with very low angular spread on epitaxial-phase
silicon carbide layers on silicon 001 substrates. From x-ray rocking curve measurements …

Fabrication of epitaxial diamond thin film on iridium

K Ohtsuka, H Fukuda, K Suzuki… - Japanese journal of …, 1997 - iopscience.iop.org
We have successfully grown smooth diamond thin films epitaxially on (001) iridium surfaces
through a direct-current plasma chemical vapor deposition process with two steps: ion …

An experimental study of high pressure synthesis of diamond films using a microwave cavity plasma reactor

KP Kuo, J Asmussen - Diamond and Related Materials, 1997 - Elsevier
Diamond film deposition on Si “benchmark” substrates is experimentally investigated at high
pressures using a microwave plasma disk reactor and CH4/H2 gas mixtures. In this …

Effects of ion bombardment on the nucleation and growth of diamond films

X Jiang, WJ Zhang, CP Klages - Physical Review B, 1998 - APS
The influence of ion bombardment on the nucleation and growth of diamond films by
microwave plasma chemical vapor deposition (CVD) has been investigated. The following …

Diamond films heteroepitaxially grown on platinum (111)

T Tachibana, Y Yokota, K Miyata, T Onishi, K Kobashi… - Physical Review B, 1997 - APS
Diamond films were grown by microwave plasma chemical vapor deposition on as-received
platinum (Pt) foils, specially processed Pt foils with (111) domains, bulk single-crystal Pt with …

Coalescence and overgrowth of diamond grains for improved heteroepitaxy on silicon (001)

X Jiang, K Schiffmann, CP Klages, D Wittorf… - Journal of applied …, 1998 - pubs.aip.org
Heteroepitaxial growth of diamond films on-SiC and Si substrates was first achieved in 1992.
1, 2 The structural quality of the films has been clearly improved during the last few years. 3 …

Bias enhanced deposition of highly oriented β-SiC thin films using low pressure hot filament chemical vapour deposition technique

VC George, A Das, M Roy, AK Dua, P Raj, DRT Zahn - Thin Solid Films, 2002 - Elsevier
Highly oriented cubic silicon carbide (β-SiC) thin films are deposited on Si (111) substrates
using bias assisted low-pressure hot filament chemical vapour deposition technique …

Heteroepitaxial diamond field-effect transistor for high voltage applications

M Syamsul, N Oi, S Okubo, T Kageura… - IEEE Electron Device …, 2017 - ieeexplore.ieee.org
The exceptional performance of diamondbased field-effect transistor technology is not
restricted to devices that use single crystallinediamond alone. This letter explores the full …