This review paper summarizes the European nanometrology landscape from a technical
perspective. Dimensional and chemical nanometrology are discussed first as they underpin …

Despite the fact that optical profilers, such as coherence scanning interferometers, are
frequently used for fast and contactless topography measurements in various fields of …

Optical scatterometry is the state of art optical inspection technique for quality control in
lithographic process. As such, any boost in its performance carries very relevant potential in …

Scatterometry is a common technique for the characterization of nanostructured surfaces.
With shrinking dimensions, fewer and fewer propagating diffraction orders exist, and …

The fight against forgery of valuable items demands efficient and reasonably priced
solutions. A security tag featuring holographic elements for anti-counterfeiting is one of them …

Scatterometry is frequently used as a non-imaging indirect optical method to reconstruct the
critical dimensions (CD) of periodic nanostructures. A particular promising direction is EUV …

A simple and robust method able to evaluate and predict, with high accuracy, the optical
properties of single and multi-layer nanostructures is presented. The method was …

Optical interference microscopes are widespread in topography and roughness
measurement on the micro-and nanoscale. In spite of a wide range of scientific and …

Library search is one of the most commonly used methods for solving the inverse problem in
optical scatterometry. The final measurement accuracy of the conventional library search …

We investigate the impact of line-edge and line-width roughness (LER, LWR) on the
measured diffraction intensities in angular resolved extreme ultraviolet (EUV) scatterometry …