Stability boundary and enhanced solution of dual-mode based micro gyroscope mode matching technology

Design and analysis of mode-matched decoupled mass MEMS gyroscope with improved thermal stability

U Bashir, SA Bazaz, MM Saleem… - Measurement …, 2024 - iopscience.iop.org
This paper presents an efficient design approach for microelectromechanical systems
(MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator …
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