Processing and characterization of piezoelectric materials and integration into microelectromechanical systems
DL Polla, LF Francis - Annual review of materials science, 1998 - annualreviews.org
▪ Abstract Piezoelectric materials have been integrated with silicon microelectromechanical
systems (MEMS) in both microsensor and microactuator applications. Thin-film materials …
systems (MEMS) in both microsensor and microactuator applications. Thin-film materials …
Polymer assisted deposition of epitaxial oxide thin films
JM Vila-Fungueiriño, B Rivas-Murias… - Journal of Materials …, 2018 - pubs.rsc.org
Chemical solution methods for thin-film deposition constitute an affordable alternative to
high-vacuum physical technologies, like Sputtering, Pulsed Laser Deposition (PLD) or …
high-vacuum physical technologies, like Sputtering, Pulsed Laser Deposition (PLD) or …
Metal alkoxides and β‐diketonates as precursors for oxide and non‐oxide thin films
LG Hubert‐Pfalzgraf - Applied organometallic chemistry, 1992 - Wiley Online Library
Single‐components or multicomponent oxide thin films are of interest for electronic and opto‐
electronic devices, optical applications, catalysis, corrosion protection etc. Their preparation …
electronic devices, optical applications, catalysis, corrosion protection etc. Their preparation …
Morphotropic relaxor boundary construction highly boosts the piezoelectric properties of Bi-based lead-free thin films
K Zhu, G Ge, F Yan, J Lin, H Bai, G Li… - … Applied Materials & …, 2022 - ACS Publications
To achieve large electrostrain and low hysteresis, we further optimized a morphotropic
phase boundary (MPB) by modulating its local polar symmetries. The construction of a …
phase boundary (MPB) by modulating its local polar symmetries. The construction of a …
Structural, optical, and dielectric properties of sol‐gel derived SrTiO3 thin films
MN Kamalasanan, N Deepak Kumar… - Journal of applied …, 1993 - pubs.aip.org
Transparent and crackfree SrTiO3 thin films were deposited on silicon wafers, fused silica,
and stainless‐steel substrates by sol‐gel technique. Strontium ethyl hexanoate and titanium …
and stainless‐steel substrates by sol‐gel technique. Strontium ethyl hexanoate and titanium …
Effect of Nb Doping on the Microstructure of Sol—Gel‐Derived PZT Thin Films
RD Klissurska, KG Brooks, IM Reaney… - Journal of the …, 1995 - Wiley Online Library
Aliovalent Nb doping (< 10 at.%) of sol—gel‐derived lead zirconate titanate (PZT) thin films
was investigated with the intention of improving the ferroelectric properties. Nb addition was …
was investigated with the intention of improving the ferroelectric properties. Nb addition was …
Solution deposition of ferroelectric thin films
BA Tuttle, RW Schwartz - MRs Bulletin, 1996 - cambridge.org
Solution deposition has been used by almost every electroceramic research-and-
development organization throughout the world to evaluate thin films. Ferrite, high …
development organization throughout the world to evaluate thin films. Ferrite, high …
Mechanisms of phase separation in gel-based synthesis of multicomponent metal oxides
Y Narendar, GL Messing - Catalysis Today, 1997 - Elsevier
The principles underlying metal oxide phase formation from multicomponent molecular gels
are reviewed. The critical phase separation mechanisms operating at each stage of the gel …
are reviewed. The critical phase separation mechanisms operating at each stage of the gel …
Structural development in the early stages of annealing of sol–gel prepared lead zirconate titanate thin films
Z Huang, Q Zhang, RW Whatmore - Journal of applied physics, 1999 - pubs.aip.org
Lead zirconate titanate (PZT) thin films on platinized silicon were fabricated and their
structural development upon annealing was characterized by x-ray diffraction and …
structural development upon annealing was characterized by x-ray diffraction and …
Improved piezoelectricity and energy storage performance simultaneously achieved in [001]-preferentially oriented Bi0. 5Na0. 5TiO3–BaTiO3–BiMnO3 thin films …
S Wu, L Xu, K Zhu, B Song, H Yan, B Shen… - Journal of the European …, 2021 - Elsevier
The control of grain orientation by introducing Nb-doped SrTiO 3 single crystalline
substrates is an effective way to improve piezoelectric and ferroelectric properties of thin …
substrates is an effective way to improve piezoelectric and ferroelectric properties of thin …