Micro-electro-mechanical systems (MEMS)-based cross-connects are widely used for all-
optical switching in recent optical networks. This paper provides a brief overview of various …

We present spatial mapping of optical force generated near the hot spot of a metal–dielectric–
metal bowtie nanoantenna at a wavelength of 1550 nm. Maxwell's stress tensor method has …

All-optical switching fabrics based on the Micro-Electro-Mechanical Systems (MEMS)
technology are now widely available on the market. This paper reviews working principles …

In this paper, a novel 2× 2 MEMS optical switch is presented. The switch, which employs the
proposed split cross-bar (SCB) design, intrinsically possesses advantages over typical 2× 2 …

This paper demonstrates applications of micro hot embossing process for fabricating vertical
micromirrors and optical switch platforms using polycarbonate as the process material. The …

A simple, low‐cost and reliable dicing‐free silicon‐on‐insulator (SOI) process is presented
for solving three major challenges in manufacturing the microelectromechanical systems …

A key process in assembly of microelectromechanical systems optical switches is of
inserting fibers into U-grooves in silicon substrate. Due to positioning errors and …

We report a 1xN rotary optical switching mirror actuated by an electrostatic comb-driver for
the optical networking. A variety of MEMS optical switching mirrors have been recently …

The design, modeling, fabrication and testing of a MEMS-based capacitive bending strain
sensor utilizing a comb drive is presented. This sensor is designed to be integrated with a …

The microengineered MEMS-type ion-sorption micropump with field-emission electron
source has been shown. Effective emission properties of the carbon nanotubes cathode …