An acceleration transducer, or accelerometer, is a sensor typically utilized for measuring
acceleration forces. These forces may be static, like the constant force of gravity, or they can …

(57) ABSTRACT A microelectromechanical (“MEMS) load sensor device for measuring a
force applied by a human user is described herein. In one aspect, the load sensor device …

In one embodiment, a ruggedized wafer level microelectro mechanical (“MEMS”) force
sensor includes a base and a cap. The MEMS force sensor includes a flexible membrane …

(57) ABSTRACT A micromechanical pressure sensor device includes: an MEMS wafer
having a front side and a rear side; a first micromechanical functional layer formed above the …

A method for fabricating a MEMS device includes providing a micro-electro-mechanical
system (MEMS) substrate having a sacrificial layer on a first side, providing a carrier …

A microelectromechanical systems (MEMS) pressure sensor device (20, 62) includes a
substrate structure (22, 64) having a cavity (32, 68) formed therein and a substrate structure …

US9902611B2 - Miniaturized and ruggedized wafer level MEMs force sensors - Google Patents
US9902611B2 - Miniaturized and ruggedized wafer level MEMs force sensors - Google Patents …

US9487388B2 - Ruggedized MEMS force die - Google Patents US9487388B2 - Ruggedized
MEMS force die - Google Patents Ruggedized MEMS force die Download PDF Info Publication …

HOIL 2L/306(2006.01)(57) ABSTRACT B8IB 3/00(2006.01) A composite wafer level MEMS
force dies including a B8IC I/00(2006.01) spacer coupled to a sensor is described herein …

Microelectromechanical systems (MEMS) devices are semiconductor devices with
embedded mechanical compo nents. MEMS devices include, for example, pressure …