Recent advances brought the performance of MEMS-based varifocal mirrors to levels
comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are …

The adhesive contact behavior between two dissimilar transversely isotropic piezoelectric
cylinders is investigated in this paper. The effect of adhesion on the contact behavior …

The authors report a micromirror device actuated by electrowetting effect. The micromirror
surface is formed by a liquid-metal droplet jetted on a substrate and then topped with a …

Microscale beam-like structures are standard components of micromechanical systems in
many devices. However, the small dimensionality affects their deformation characteristics …

A complementary metal-oxide-semiconductor (CMOS)-compatible one-mask process for the
design and fabrication of three-dimensional (3-D) microelectromechanical systems (MEMS) …

This paper presents a simple method for the in situ determination of Young's moduli of
surface-micromachined bilayer thin films. The test structure consists of a cantilever, a bottom …

Multilayered structures are increasingly used in MEMS. Based on the resonant frequency of
the doubly–clamped multilayered beam, the Young's modulus and residual stress for an …

Various multilayered thin films are extensively used as the basic component of some micro-
electro-mechanical systems, requiring an efficient measurement method for material …

We present a design and operation concept of a scanning device based on an electrostatic
torsional micromirror that is aimed to fulfil the requirements of motion linearity, high …

In this paper, nonsmooth fold bifurcations associated with the onset of low-relative-velocity
(near-grazing) impacts in an oscillatory mechanical system are proposed as a potential …