Advances in capacitive micromachined ultrasonic transducers

K Brenner, AS Ergun, K Firouzi, MF Rasmussen… - Micromachines, 2019 - mdpi.com
Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid
development in the last decade. Advancements both in fabrication and integration, coupled …

Design strategies for dielectric metal–organic frameworks and their applications in microelectronic devices

AI Inamdar, S Kamal, M Usman, MH Chiang… - Coordination Chemistry …, 2024 - Elsevier
Dielectric materials that are currently used in electronic devices rely on conventional
inorganic materials, and their inherent shortcomings prohibit conventional materials from …

Reliability issue related to dielectric charging in capacitive micromachined ultrasonic transducers: A review

J Munir, Q Ain, HJ Lee - Microelectronics Reliability, 2019 - Elsevier
The long-term reliability of MEMS devices related to the dielectric charging phenomenon is
one of the main hurdles in the commercialization of these devices. This paper presents a …

Performance analysis of FEM simulated different shaped membranes based capacitive MEMS sensor

C Hmingthansanga, R Maity, BK Nath, S Dutta… - Microsystem …, 2024 - Springer
The study of a micro-electro-mechanical-system (MEMS) based capacitive micromachined
ultrasonic transducer (CMUT) is considered. The characteristics and behavioral studies of …

Thickness effect on the optical and morphological properties in Al2O3/ZnO nanolaminate thin films prepared by atomic layer deposition

J López, J Martínez, N Abundiz, D Domínguez… - Superlattices and …, 2016 - Elsevier
In this work, we studied the optical and morphological properties of ultrathin nanolaminate
films based on Al 2 O 3/ZnO (AZ) bilayers stack. The films were deposited on Si (100) by …

Analysis and design of high-frequency 1-D CMUT imaging arrays in noncollapsed mode

EF Arkan, FL Degertekin - IEEE transactions on ultrasonics …, 2018 - ieeexplore.ieee.org
High-frequency ultrasound imaging arrays are important for a broad range of applications,
from small animal imaging to photoacoustics. Capacitive micromachined ultrasonic …

Circuits on miniaturized ultrasound imaging system-on-a-chip: a review

J Lim - Biomedical Engineering Letters, 2022 - Springer
Trends of medical system move from a traditional in-person visit to virtual healthcare
increases demands on point-of-care devices. Because ultrasound (US) is non-invasive, the …

A capacitive ultrasonic transducer based on parametric resonance

S Surappa, S Satir, F Levent Degertekin - Applied physics letters, 2017 - pubs.aip.org
A capacitive ultrasonic transducer based on a parametric resonator structure is described
and experimentally demonstrated. The transducer structure, which we call capacitive …

Supply-doubled pulse-shaping high voltage pulser for CMUT arrays

G Jung, C Tekes, A Pirouz… - … on Circuits and …, 2017 - ieeexplore.ieee.org
A supply-doubled pulse-shaping high voltage (HV) pulser is presented for medical
ultrasound imaging applications, particularly those that use capacitive micromachined …

Real-time imaging system using a 12-MHz forward-looking catheter with single chip CMUT-on-CMOS array

C Tekes, T Xu, TM Carpenter, S Bette… - 2015 IEEE …, 2015 - ieeexplore.ieee.org
Forward looking (FL) imaging catheters would be an important tool for several intravascular
ultrasound (IVUS) and intracardiac echocardiography (ICE) applications. Single chip …