MEMS force sensors embedded in flexible polyimide substrates are reported, motivated by
the need to monitor force and pressure on nonplanar surfaces for structural health …

Shirafuji, J.,“Morphological fluctuation and electrical properties of sputtered hydrogenated
silicon.” Appl. Phys. Lett. 41: 535-537 (1982). Sieber, I.,“Preparation of thin polycrystalline …

This paper describes the fabrication and characterization of micromachined, piezoresistive,
absolute pressure sensors sandwiched between a flexible polyimide. The sensors are …

A low-temperature deposition process employing aluminum-induced crystallization has
been developed for fabrication of piezoresistive polycrystalline silicon (polysilicon) films on …

Ceramic strain gages are being developed to monitor the structural integrity of gas turbine
engine components employed in aerospace propulsion and power generation systems …

We report a microcantilever probe with a 5 nm gold deflection sensor for the study of local
mechanical properties such as adhesion and elasticity on a sample. The probe has a …

This paper reviews the operation principles of piezoelectric sensors for airport surface
movement control. Using an array of sensors, it enables the detection of moving objects as …

MEMS sensors on flexible substrates were developed and fabricated utilizing conventional
lithography, deposition and etching tools. All of these sensors were fabricated in a MESA …

With the extension of the service time of the structure and the worse service temperature
conditions, the drift problem of hightemperature strain gauges gradually becomes …

ACKNOWLEDGEMENTS I would like to sincerely thank my advisor Dr. Zeynep Çelik-Butler
from the bottom of my heart for her constant encouragement and backing throughout my Ph …