Review on the modeling of electrostatic MEMS
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of
couplings of such energy domains as electromechanics, optical electricity, thermoelectricity …
couplings of such energy domains as electromechanics, optical electricity, thermoelectricity …
Modeling, simulation and validation of the dynamic performance of a single-pole single-throw RF-MEMS contact switch
C Do, M Hill, M Lishchynska… - 2011 12th Intl. Conf …, 2011 - ieeexplore.ieee.org
This work presents a low-complexity dynamic model of a single-pole single-throw (SPST)
ruthenium contact radio frequency (RF) MEMS switch. The model is based on a fabricated …
ruthenium contact radio frequency (RF) MEMS switch. The model is based on a fabricated …
Theory of the Solution of Inventive Problems (TRIZ) and Computer Aided Design (CAD) for Micro-electro-mechanical Systems (MEMS)
H Yu, S Cui, D Shi, D Fan, J Guo - Intelligent Computation in Big Data Era …, 2015 - Springer
Satellite remote sensing technology is widely used in all walks of life, which plays an
increasingly remarkable results in natural disasters (sudden and major). With more and …
increasingly remarkable results in natural disasters (sudden and major). With more and …
MEMS packaging and reliability
YC Lee - Micro-and Opto-Electronic Materials and Structures …, 2007 - Springer
Microelectromechanical systems (MEMS) technology enables us to create different sensing
and actuating devices integrated with other microelectronic, optoelectronic, microwave …
and actuating devices integrated with other microelectronic, optoelectronic, microwave …
Theory of the Solution of Inventive Problems for Flexure Design in Micro-Electro-Mechanical Systems
H Yu, S Cui - TELKOMNIKA Indonesian Journal of Electrical …, 2014 - journal.esperg.com
In this paper detail of the optimization of a flexure design which is used in many MEMS
devices will be presented. Due to a difference in thermal expansion coefficients between the …
devices will be presented. Due to a difference in thermal expansion coefficients between the …
[引用][C] Математическое моделирование элементов МЭМС как многослойных распределенных механических структур в условиях наиболее приближенных к …
ТВ Яковлева, ВС Кружилин, ВА Крысько - 2020 - elibrary.ru
Объектом исследования являются многослойные распределенные механические
структуры. Цель работы–создание принципиально новой математической модели и …
структуры. Цель работы–создание принципиально новой математической модели и …
[引用][C] Design optimization & realization of µ motion mechanisms for on board correction of segmented mirrors
V Sinha, V Chaudhary, H Arora, AR Srinivas…