Subnanometer translation of microelectromechanical systems measured by discrete Fourier analysis of CCD images

C Yamahata, E Sarajlic, GJM Krijnen… - Journal of …, 2010 - ieeexplore.ieee.org
In-plane linear displacements of microelectromechanical systems are measured with
subnanometer accuracy by observing the periodic micropatterns with a charge-coupled …

Three-phase electrostatic rotary stepper micromotor with a flexural pivot bearing

E Sarajlic, C Yamahata, M Cordero… - Journal of …, 2010 - ieeexplore.ieee.org
Electrostatic stepper motors, also known as synchronous variable-capacitance motors,
operate by utilizing the electrical energy stored in the variable capacitances formed between …

Real-time continuous image registration enabling ultraprecise 2-D motion tracking

P Cheng, CH Menq - IEEE Transactions on Image Processing, 2013 - ieeexplore.ieee.org
In this paper, we present a novel continuous image registration method (CIRM), which yields
near-zero bias and has high computational efficiency. It can be realized for real-time position …

Vision-based microforce measurement with a large range-to-resolution ratio using a twin-scale pattern

V Guelpa, GJ Laurent, P Sandoz… - … /ASME Transactions on …, 2015 - ieeexplore.ieee.org
Force sensors are often required in order to work at the microscale, but existing ones rarely
meet all expectations, particularly in terms of resolution, range, accuracy, or integration …

High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method

P Sandoz, V Bonnans, T Gharbi - Applied optics, 2002 - opg.optica.org
We introduced recently phase measurements usually performed in interferometry to the
domain of image processing and intelligent vision [IEEE Trans. Instrum. Meas. 49, 867 …

Position referencing in optical microscopy thanks to sample holders with out‐of‐focus encoded patterns

P Sandoz, R Zeggari, L Froehly, JL Pretet… - Journal of …, 2007 - Wiley Online Library
This article introduces smart sample holders for optical microscopy. Their purpose is to allow
the absolute determination of the position of the observed zone with respect to the sample …

In-plane rigid-body vibration mode characterization with a nanometer resolution by stroboscopic imaging of a microstructured pattern

P Sandoz, JM Friedt, E Carry - Review of scientific instruments, 2007 - pubs.aip.org
This article introduces an improved approach for the characterization of in-plane rigid-body
vibration, based on digital processing of stroboscopic images of the moving part. The …

Measurement of the Robot Motor Capability of a Robot Motor System: A Fitts's-Law-Inspired Approach

HI Lin, CS George Lee - Sensors, 2013 - mdpi.com
Robot motor capability is a crucial factor for a robot, because it affects how accurately and
rapidly a robot can perform a motion to accomplish a task constrained by spatial and …

Vision-based tracking of a dynamic target with application to multi-axis position control

CA Montes, C Wong, JC Ziegert, L Mears - Journal of Real-Time Image …, 2015 - Springer
Two sub-pixel resolution approaches to measure in-plane displacements and in-plane
rotation of a known target, through image processing, are described in this research. A …

Systematic error analysis and parameter design of a vision-based phase estimation method for ultra-precision positioning

Q Cheng, T Xu, P Huang - Optics Express, 2022 - opg.optica.org
Ultra-precision position measurement is increasingly important in advanced manufacturing
such as the semiconductor industry and fiber optics or photonics. A vision-based phase …