Atomic layer deposition of metals: Precursors and film growth

DJ Hagen, ME Pemble, M Karppinen - Applied Physics Reviews, 2019 - pubs.aip.org
The coating of complex three-dimensional structures with ultrathin metal films is of great
interest for current technical applications, particularly in microelectronics, as well as for basic …

Emerging applications of atomic layer deposition for the rational design of novel nanostructures for surface-enhanced Raman scattering

J Prakash, HC Swart, G Zhang, S Sun - Journal of Materials Chemistry …, 2019 - pubs.rsc.org
Surface-enhanced Raman scattering (SERS) has been recognized as an excellent
spectroscopic technique for ultrasensitive and quantitative chemical/biochemical sensing …

Antibacterial and Osteogenic Properties of Ag Nanoparticles and Ag/TiO2 Nanostructures Prepared by Atomic Layer Deposition

D Nazarov, I Ezhov, N Yudintceva, M Shevtsov… - Journal of Functional …, 2022 - mdpi.com
The combination of titania nanofilms and silver nanoparticles (NPs) is a very promising
material, with antibacterial and osseointegration-induced properties for titanium implant …

Low-temperature plasma modification, structural characterization and anti-diabetic activity of an apricot pectic polysaccharide

W Sun, X Kou, CE Wu, GJ Fan, TT Li, X Cheng… - International Journal of …, 2023 - Elsevier
To fully research the anti-diabetic activity of apricot polysaccharide, low temperature plasma
(LTP) was used to modify apricot polysaccharide. The modified polysaccharide was isolated …

Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant

MFJ Vos, G van Straaten, WMME Kessels… - The Journal of …, 2018 - ACS Publications
This work investigates the role of the co-reactant for the atomic layer deposition of cobalt
(Co) films using cobaltocene (CoCp2) as the precursor. Three different processes were …

Silver Thin‐Film Electrodes Grown by Low‐Temperature Plasma‐Enhanced Spatial Atomic Layer Deposition at Atmospheric Pressure

T Hasselmann, B Misimi, N Boysen… - Advanced Materials …, 2023 - Wiley Online Library
The unique properties of atomic layer deposition (ALD) are mainly exploited for metal
oxides, while the growth of metals, such as silver, is still in its infancy. Low growth …

Plasma-enhanced modification of polysaccharides for wastewater treatment: A review

CM Laureano-Anzaldo, ME González-López… - Carbohydrate …, 2021 - Elsevier
In this work, novel polysaccharide-based sorbents modified with plasma technologies are
discussed. Plasma selectively modifies the surface properties by generating specific …

Low-temperature ALD of highly conductive antimony films through the reaction of silylamide with alkoxide and alkylamide precursors

S He, A Bahrami, X Zhang, J Julin, M Laitinen… - Materials Today …, 2023 - Elsevier
Antimony (Sb) has distinct physical properties that make it a promising candidate for use in
integrated phase-change photonics and tunable optical absorbers. In this work, we present …

An N‐Heterocyclic Carbene Based Silver Precursor for Plasma‐Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure

N Boysen, T Hasselmann, S Karle… - Angewandte Chemie …, 2018 - Wiley Online Library
A new N‐heterocyclic carbene (NHC)‐based silver amide compound, 1, 3‐di‐tert‐butyl‐
imidazolin‐2‐ylidene silver (I) 1, 1, 1‐trimethyl‐N‐(trimethylsilyl) silanaminide [(NHC) Ag …

Large-scale deposition and growth mechanism of silver nanoparticles by plasma-enhanced atomic layer deposition

S Wack, P Lunca Popa, N Adjeroud… - The Journal of …, 2019 - ACS Publications
The control of nanometer-scale metallic silver particles morphology and their functional
properties on a large scale represent a key factor for applications such as plasmonics …