Modelling of electronegative collisional warm plasma for plasma-surface interaction process
An electronegative collisional plasma having warm and massive positive ions, non-
extensive distributed electrons and Boltzmann distributed negative ions is modelled for the …
extensive distributed electrons and Boltzmann distributed negative ions is modelled for the …
Effect of aging on the properties of TiO2 nanoparticle
NE Jasbi, D Dorranian - Journal of Theoretical and Applied Physics, 2016 - Springer
Abstract Effect of aging on the properties of titanium dioxide nanoparticles produced by laser
ablation process in water is investigated experimentally. The fundamental wavelength of a Q …
ablation process in water is investigated experimentally. The fundamental wavelength of a Q …
Sheath formation criterion in collisional electronegative warm plasma
In this paper, the sheath formation criterion for three different electronegative plasmas,
namely CF 4, O 2 and C 60 plasmas, has been numerically investigated under the …
namely CF 4, O 2 and C 60 plasmas, has been numerically investigated under the …
Fabrication of TiN metal hard masks via very-high-frequency-direct-current superimposed sputtering
BH Jeong, DW Kim, GY Yeom, KN Kim - Materials Science in …, 2024 - Elsevier
In high-end logic devices, TiN films have attracted increasing attention as metal hard masks
(MHMs) for scaling trenches and vias of Cu back-end of line. In this study, we investigated …
(MHMs) for scaling trenches and vias of Cu back-end of line. In this study, we investigated …
The effect of annealing on the structural, optical and electrical properties of Titanium Nitride (TiN) thin films prepared by DC magnetron sputtering with supported …
A Kavitha, R Kannan, P Sreedhara Reddy… - Journal of Materials …, 2016 - Springer
Abstract Nano-crystalline Titanium Nitride (TiN) thin films were deposited on glass
substrates by reactive DC magnetron sputtering in the presence of a supported discharge …
substrates by reactive DC magnetron sputtering in the presence of a supported discharge …
Influence of ionization on sheath structure in electropositive warm plasma carrying two-temperature electrons with non-extensive distribution
A collisional electropositive plasma having two-temperature (hot and cold) electrons with
non-extensive distribution and warm ions is investigated for the sheath structure by taking …
non-extensive distribution and warm ions is investigated for the sheath structure by taking …
Sheath characteristics in plasma carrying finite mass negative ions and ionization at low frequency
The sheath characteristics are investigated in a collisional environment by considering three
electronegative plasmas, namely CF 4, Oxygen, and C 60 plasmas. Specifically, positive ion …
electronegative plasmas, namely CF 4, Oxygen, and C 60 plasmas. Specifically, positive ion …
Behaviour of sheath in electronegative warm plasma
Behaviour of sheath formed on two types of probes, namely cylindrical and spherical probes,
has been investigated in terms of its thickness, in front of the conducting probes immersed in …
has been investigated in terms of its thickness, in front of the conducting probes immersed in …
Sheath structure in electronegative plasma having cold ions: An impact of negative ions' mass
A novel concept of the mass ratio of negative to positive ions has been introduced to explore
its effect on the sheath structure in three electronegative cold plasmas, namely, CF 4, O 2 …
its effect on the sheath structure in three electronegative cold plasmas, namely, CF 4, O 2 …
Impact of nitrogen reactive gas and substrate temperature on the optical, electrical and structural properties of sputtered TiN thin films
N Mustapha, Z Fekkai - Journal of Materials Science: Materials in …, 2020 - Springer
This work was aimed to study the influence of nitrogen reactive gas and substrate
temperature, on the crystalline structure, morphology, sheet resistance and optical …
temperature, on the crystalline structure, morphology, sheet resistance and optical …