Microsystems or micro-electro-mechanical systems (MEMS), as a newly emerged
revolutionary enabling technology, has brought both opportunities and challenges to the …

Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

In this paper, fully monolithic silicon optical scanners are demonstrated with large static
optical beam deflection. The main advantage of the scanners is their high speed of …

As miniaturization, batch fabrication, and integrated electronics rapidly enable the
development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …

We analyze the effect of misalignment in electrostatic combdrives, and describe a fabrication
technology that minimizes misalignment in vertical electrostatic combdrives by creating self …

Two microelectrostatic actuators able to produce a repulsive force in the out-of-plane
direction are presented in this paper. The electrostatic actuators use an asymmetric electric …

Two types of electrostatically actuated tensile stages for in situ electron microscopy
mechanical testing of 1-D nanostructures were designed, microfabricated, and tested …

A microfabrication technology has been developed and demonstrated, which enhances the
capabilities and applications of high aspect ratio silicon-on-insulator …

We report on the formation of a lateral comb drive on poly-methyl-meth-acrylate (PMMA)
using the hot embossing technique. A hot embossing mold insert is fabricated on a silicon …

We have designed, fabricated, and demonstrated large vertical displacement vertical
microlens scanners with low (< 10 V) driving voltage using silicon-on-insulator technology …