Atomic layer deposition of ZnO: a review

T Tynell, M Karppinen - Semiconductor Science and Technology, 2014 - iopscience.iop.org
Due to the unique set of properties possessed by ZnO, thin films of ZnO have received more
and more interest in the last 20 years as a potential material for applications such as thin-film …

[HTML][HTML] 92 years of zinc oxide: has been studied by the scientific community since the 1930s-An overview

P Sharma, MR Hasan, NK Mehto, A Bishoyi… - Sensors …, 2022 - Elsevier
Zinc oxide (ZnO) is a one-of-a-kind material with semiconducting, piezoelectric, &
pyroelectric properties. Before the arrival of the nanotechnology field, zinc oxide was used in …

New efficient solar cell structures based on zinc oxide nanorods

R Pietruszka, BS Witkowski, S Gieraltowska… - Solar Energy Materials …, 2015 - Elsevier
In this paper, cheap and efficient photovoltaic cells based on ZnO/Si heterostructure are
discussed. These cells contain zinc oxide nanorods (ZnO NR) grown by a low temperature …

Electrical and optical properties of Al-doped ZnO and ZnAl2O4 films prepared by atomic layer deposition

Q Hou, F Meng, J Sun - Nanoscale research letters, 2013 - Springer
ZnO/Al 2 O 3 multilayers were prepared by alternating atomic layer deposition (ALD) at 150°
C using diethylzinc, trimethylaluminum, and water. The growth process, crystallinity, and …

Aluminum-doped zinc oxide films grown by atomic layer deposition for transparent electrode applications

G Luka, TA Krajewski, BS Witkowski, G Wisz… - Journal of Materials …, 2011 - Springer
We obtained zinc oxide films doped with aluminum using atomic layer deposition (ALD).
Their morphology, growth mode, optical and electrical properties are studied. Al content …

Atomic layer deposition: an enabling technology for the growth of functional nanoscale semiconductors

N Biyikli, A Haider - Semiconductor Science and Technology, 2017 - iopscience.iop.org
In this paper, we present the progress in the growth of nanoscale semiconductors grown via
atomic layer deposition (ALD). After the adoption by semiconductor chip industry, ALD …

Structural, optical, and electrical properties of hafnium–aluminum–zinc-oxide films grown by atomic layer deposition for TCO applications

M Krajewski, M Tokarczyk, P Świętochowski… - ACS …, 2023 - ACS Publications
ZnO is a widely studied material that exhibits versatile doping possibilities. Most research
presents singly doped ZnO, leaving the potential of codoping unexplored. Within this study …

Highly conductive and transparent hybrid organic–inorganic zincone thin films using atomic and molecular layer deposition

B Yoon, BH Lee, SM George - The Journal of Physical Chemistry …, 2012 - ACS Publications
Highly conducting and transparent hybrid organic–inorganic thin films were grown using
atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques. The …

Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow‐Power Metal Oxide Semiconductor‐Based Gas Sensors

T Kim, W Cho, B Kim, J Yeom, YM Kwon, JM Baik… - Small, 2022 - Wiley Online Library
The demand for power‐efficient micro‐and nanodevices is increasing rapidly. In this regard,
electrothermal nanowire‐based heaters are promising solutions for the ultralow‐power …

Nucleation and growth modes of ALD ZnO

Z Baji, Z Labadi, ZE Horvath, G Molnár… - Crystal growth & …, 2012 - ACS Publications
The initial phases of the ALD growth of ZnO have been examined. It is shown that ZnO
exhibits an island-like growth on Si, layer-by-layer on GaN, whereas on sapphire, the growth …