Atomic layer deposition of ZnO: a review
T Tynell, M Karppinen - Semiconductor Science and Technology, 2014 - iopscience.iop.org
Due to the unique set of properties possessed by ZnO, thin films of ZnO have received more
and more interest in the last 20 years as a potential material for applications such as thin-film …
and more interest in the last 20 years as a potential material for applications such as thin-film …
[HTML][HTML] 92 years of zinc oxide: has been studied by the scientific community since the 1930s-An overview
P Sharma, MR Hasan, NK Mehto, A Bishoyi… - Sensors …, 2022 - Elsevier
Zinc oxide (ZnO) is a one-of-a-kind material with semiconducting, piezoelectric, &
pyroelectric properties. Before the arrival of the nanotechnology field, zinc oxide was used in …
pyroelectric properties. Before the arrival of the nanotechnology field, zinc oxide was used in …
New efficient solar cell structures based on zinc oxide nanorods
R Pietruszka, BS Witkowski, S Gieraltowska… - Solar Energy Materials …, 2015 - Elsevier
In this paper, cheap and efficient photovoltaic cells based on ZnO/Si heterostructure are
discussed. These cells contain zinc oxide nanorods (ZnO NR) grown by a low temperature …
discussed. These cells contain zinc oxide nanorods (ZnO NR) grown by a low temperature …
Electrical and optical properties of Al-doped ZnO and ZnAl2O4 films prepared by atomic layer deposition
Q Hou, F Meng, J Sun - Nanoscale research letters, 2013 - Springer
ZnO/Al 2 O 3 multilayers were prepared by alternating atomic layer deposition (ALD) at 150°
C using diethylzinc, trimethylaluminum, and water. The growth process, crystallinity, and …
C using diethylzinc, trimethylaluminum, and water. The growth process, crystallinity, and …
Aluminum-doped zinc oxide films grown by atomic layer deposition for transparent electrode applications
G Luka, TA Krajewski, BS Witkowski, G Wisz… - Journal of Materials …, 2011 - Springer
We obtained zinc oxide films doped with aluminum using atomic layer deposition (ALD).
Their morphology, growth mode, optical and electrical properties are studied. Al content …
Their morphology, growth mode, optical and electrical properties are studied. Al content …
Atomic layer deposition: an enabling technology for the growth of functional nanoscale semiconductors
In this paper, we present the progress in the growth of nanoscale semiconductors grown via
atomic layer deposition (ALD). After the adoption by semiconductor chip industry, ALD …
atomic layer deposition (ALD). After the adoption by semiconductor chip industry, ALD …
Structural, optical, and electrical properties of hafnium–aluminum–zinc-oxide films grown by atomic layer deposition for TCO applications
M Krajewski, M Tokarczyk, P Świętochowski… - ACS …, 2023 - ACS Publications
ZnO is a widely studied material that exhibits versatile doping possibilities. Most research
presents singly doped ZnO, leaving the potential of codoping unexplored. Within this study …
presents singly doped ZnO, leaving the potential of codoping unexplored. Within this study …
Highly conductive and transparent hybrid organic–inorganic zincone thin films using atomic and molecular layer deposition
B Yoon, BH Lee, SM George - The Journal of Physical Chemistry …, 2012 - ACS Publications
Highly conducting and transparent hybrid organic–inorganic thin films were grown using
atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques. The …
atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques. The …
Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow‐Power Metal Oxide Semiconductor‐Based Gas Sensors
The demand for power‐efficient micro‐and nanodevices is increasing rapidly. In this regard,
electrothermal nanowire‐based heaters are promising solutions for the ultralow‐power …
electrothermal nanowire‐based heaters are promising solutions for the ultralow‐power …
Nucleation and growth modes of ALD ZnO
The initial phases of the ALD growth of ZnO have been examined. It is shown that ZnO
exhibits an island-like growth on Si, layer-by-layer on GaN, whereas on sapphire, the growth …
exhibits an island-like growth on Si, layer-by-layer on GaN, whereas on sapphire, the growth …