Integrated sensors and actuators are rapidly evolving to provide an important link between
very large scale integrated circuits and nonelectronic monitoring and control applications …

A new micromachined gyroscope based on a vibrating ring is described. The device
measures rotation rate or whole angle inertial rotation by monitoring the position of node …

Complex metal structures are formed in microminiature dimensions utilizing multiple mask
exposures which are capable of producing substantially arbitrary three-di mensional …

Nanotechnology is becoming vitally important in many industrial fields, offering significant
wealth creating opportunities and massive improvements to standards of living. This paper …

Interdigitated finger (comb) structures are demonstrated to be effective for electrostatically
exciting the resonance of polycrystalline-silicon (polysilicon) microstructures parallel to the …

Microelectromechanical systems (MEMS), micro systems technologies (MST, primarily in
Europe) and micromanufacturing have become synonymous with the design, development …

3,336,534 5/1975 Cook, Jr_ et a1_. In the formation of m1crostructures, a preformed sheet
3,984,582 10/1976 Feder et a1.. of phot0res1st, such as polymethylmethacrylate 4,035,522 …

A polyiimide-based process for the fabrication of thick (1-150 mu m), sharp-sidewall, high-
aspect-ratio electroplated microstructures is presented. This process is a low-cost alternative …

The authors describe a single-sided bulk silicon dissolved wafer process that has been used
to fabricate several different micromechanical devices. It involves the simultaneous …

The storage capacities and areal densities found in magnetic disk drives are increasing very
rapidly. Data is recorded in ever-narrower tracks which must be followed with extreme …