Effect of KrF Laser Irradiation on the Morphology and Microstructure of Amorphous PZT Thin Films Grown by RF Magnetron Sputtering
M Mahdi, M Kadri - Journal of Electronic Materials, 2021 - Springer
This work deals with the crystallization of amorphous PZT thin films, induced by a 248 nm
KrF laser source. PZT thin films, 250 nm thick, were grown on three different substrates …
KrF laser source. PZT thin films, 250 nm thick, were grown on three different substrates …
[PDF][PDF] Sputtering Parameters Influence on the as Deposited PZT Thin Films: Surface Roughness and Morphology
M Mahdi, M Kadri, L Henni… - Int. J. Thin. Fil. Sci …, 2022 - digitalcommons.aaru.edu.jo
A homemade target of Pb (Zr0. 48, Ti0. 52) O3 is sputtered out under different conditions of
power and Argon pressure on platinized silicon substrates, however, the distance inter …
power and Argon pressure on platinized silicon substrates, however, the distance inter …