US7892648B2 - SiCOH dielectric material with improved toughness and improved Si-C bonding
- Google Patents US7892648B2 - SiCOH dielectric material with improved toughness and …

The present invention provides multi-arm siloxane-based molecules Suitable for use as a
drug delivery vehicle compris ing a central core molecule that comprises a cyclic or cubic …

Provided are a composition for forming film which can form a porous film excelling in
dielectric constant, adhesiveness, uniformity of the film, mechanical Strength and having low …

A process for producing a film forming composition, the process including hydrolyzing and
condensing:(A) at least one silane compound selected from a compound (A-1) shown by the …

RnSi (OR"). Also provided is a method for manufacturing a porous film comprising steps of
applying said composition So as to form a film, drying the film and transforming the dried film …

(57) ABSTRACT A multi-functional cyclic siloxane compound (A), a siloxane based (co)
polymer prepared from the compound (A), or com pound (A) and at least one of a Si …

A siloxane-based resin having a novel structure and a semiconductor interlayer insulating
film using the same. The siloxane-based resins have a low dielectric constant in addition to …

The present invention relates to a composition for film formation which can be formed into a
porous film that excels in dielectric properties, adhesion, film consistency and mechanical …

Provided are a composition for forming film which can form porous film excelling in dielectric
constant, adhesiveness, uniformity of the film, mechanical strength and having low …

This application is a continuation of US patent applica tion Ser. No. 1 1/132,108, filed on
May 18, 2005, now US Pat. No. 7,479,306, which is a continuation-in-part applica tion of US …