A microcantilever is a suspended micro-scale beam structure supported at one end which
can bend and/or vibrate when subjected to a load. Microcantilevers are one of the most …

This paper reviews our recent work on vibrating sensors for the physical properties of fluids,
particularly viscosity and density. Several device designs and the associated properties …

Complex, three-dimensional (3D) mesostructures that incorporate advanced, mechanically
active materials are of broad, growing interest for their potential use in many emerging …

This is the first book to bring together both the basic theory and proven process engineering
practice of AFM. It is presented in a way that is accessible and valuable to practising …

At the microscale, cantilever vibrations depend not only on the microstructure's properties
and geometry but also on the properties of the surrounding medium. In fact, when a …

High-frequency rheology is a form of mechanical spectroscopy which provides access to fast
dynamics in soft materials and hence can give valuable information about the local scale …

We report on the fabrication of a self-actuated resonant-microsensor, based on a thick-film
piezoelectric cantilever, dedicated to either (bio) chemical detection in gaseous or liquid …

This paper proposes a novel method for measuring blood plasma and serum viscosity with a
microcantilever-based MEMS sensor. MEMS cantilevers are made of electroplated nickel …

Micro-electromechanical systems (MEMS) that rely on structural vibrations have many
important applications, ranging from oscillators and actuators, to energy harvesters and …

Silicon microcantilevers can be used to measure the rheological properties of complex
fluids. In this paper, two different methods will be presented. In the first method, the …