Trends and applications of surface and bulk acoustic wave devices: a review

Y Yang, C Dejous, H Hallil - Micromachines, 2022 - mdpi.com
The past few decades have witnessed the ultra-fast development of wireless
telecommunication systems, such as mobile communication, global positioning, and data …

Gyroscopes based on surface acoustic waves

H Oh, KJ Lee, K Lee, SS Yang - Micro and Nano Systems Letters, 2015 - Springer
This review gives an overview of the development of surface acoustic wave (SAW) based
gyroscopes. Different types of SAW based gyroscope are first presented, which are …

Development of a high-sensitivity strain measurement system based on a SH SAW sensor

H Oh, K Lee, K Eun, SH Choa… - … of Micromechanics and …, 2012 - iopscience.iop.org
A strain measurement system based on a shear horizontal surface acoustic wave (SH SAW)
was developed. The developed system is composed of a SAW microsensor, a printed circuit …

FEM Simulation of a High-Performance 128°Y–X LiNbO3/SiO2/Si Functional Substrate for Surface Acoustic Wave Gyroscopes

R Ma, W Liu, X Sun, S Zhou, D Lin - Micromachines, 2022 - mdpi.com
To obtain a high-performance surface acoustic wave (SAW) gyroscope substrate, the
propagation characteristics and gyroscopic effect of Rayleigh waves in a 128° Y–X …

Surface acoustic wave gyroscopic effect in an interdigital transducer

X Sun, W Liu, X Shao, S Zhou, W Wang, D Lin - Sensors, 2018 - mdpi.com
The surface acoustic wave (SAW) gyroscopic effect in an interdigital transducer (IDT)
deposited on a piezoelectric substrate is different from that in the piezoelectric substrate due …

Optimization of surface acoustic wave-based rate sensors

F Xu, W Wang, X Shao, X Liu, Y Liang - Sensors, 2015 - mdpi.com
The optimization of an surface acoustic wave (SAW)-based rate sensor incorporating
metallic dot arrays was performed by using the approach of partial-wave analysis in layered …

Finite Element Analysis of the Distribution Parameters of a Metal Dot Array in a SAW Gyroscope

H Chen, M Lu, L Meng, W Wang, X Shao - Applied Sciences, 2022 - mdpi.com
A surface acoustic wave (SAW) gyroscope has many unique advantages, but a low
detection sensitivity limits its development. Previous studies have shown that adding a metal …

Effects of rotation on a phononic crystal operated in whispering gallery modes

F Ge, L Zhao, J Xu, X Ding - Physical Review B, 2024 - APS
In this paper, the effects of rotation on a phononic crystal (PnC) operated in whispering-
gallery modes (WGMs) are investigated for the first time. According to the results of a finite …

Micro rate gyros for highly dynamic objects

D Lukyanov, S Shevchenko, A Kukaev - Microsystem technologies, 2014 - Springer
Modern MEMS gyros are used in many different applications, but still there is an area that is
uncovered-highly dynamic objects. It requires shock resistance up to 65,000 g and ability to …

Development of novel dual-axis sensing gyroscope using surface acoustic wave

H Oh, KJ Lee, SS Yang, K Lee - Microelectronic engineering, 2012 - Elsevier
This study proposes a new dual-axis sensing gyroscope based on SAW (surface acoustic
wave), in which two substrates are bonded together and completely sealed. The gyroscope …