Microsystems or micro-electro-mechanical systems (MEMS), as a newly emerged
revolutionary enabling technology, has brought both opportunities and challenges to the …

Optical techniques which were developed for ex situ characterization of static
displacements, motions, vibrations and internal strain of micromechanical devices and M (O) …

Where conventional testing and inspection techniques fail at the micro-scale, optical
techniques provide a fast, robust, and relatively inexpensive alternative for investigating the …

Microscopic interferometry is a powerful technique for the static and dynamic
characterization of micromechanical devices. In this paper we emphasize its capabilities for …

Microscopic homodyne interferometry with monochromatic or white light illumination is up to
now the most widely used technique for micromechanical devices and MEMS surface …

Interferometric optical profilometers are increasingly used for the characterization of the
static deformation of micromechanical devices and Micro (Opto) Electromechanical Systems …

This work focuses on the implementation of a structured light projection technique for the
analysis of the 3D vibration modes of microsamples. The Talbot image of a Ronchi grating is …

摘要微结构是微机电系统的基本元件, 其几何尺寸, 运动特性, 材料及力学特性直接影响微机电
系统的整体性能. 提出一种将计算机微视觉, 米劳显微干涉, 频闪成像和激光多普勒测振等技术 …

A computer-controlled micro-motion analyzer (MMA) to study the dynamic behavior of
movable structures of MEMS is described in this paper. It employs two optical nondestructive …

We introduce a new modality for dynamic phase imaging in confocal microscopy based on
synthetic optical holography. By temporal demultiplexing of the detector signal into a series …