In this paper, we review a recent technology development based on coupled MEMS
resonators that has the potential of fundamentally transforming MEMS resonant sensors …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This paper reports an acceleration sensing method based on two weakly coupled
resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on …

With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

This paper reports a high-sensitivity resonant electrometer based on the mode localization
of two degree-of-freedom weakly coupled resonators (WCRs). When charges are applied to …

Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical
resonators, provide an unprecedented platform for investigating a wide range of applications …

Singularities ubiquitously exist in different fields and play a pivotal role in probing the
fundamental laws of physics and developing highly sensitive sensors. Nevertheless …

This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems
(MEMS) resonant sensing device consisting of three weakly coupled resonators with …

The mode localization phenomenon of disordered weakly coupled resonators (WCRs) is
being used as a novel transduction scheme to further enhance the sensitivity of …

An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower
the coupling factor of the coupled resonators thus improving the parametric amplitude ratio …