Effect of N2 reactive gas flow rate on the structural, optical and wettability properties of silicon carbon oxynitride thin films

AA Aghaei, A Eshaghi, M Ramazani, H Zabolian… - Heliyon, 2024 - cell.com
In the current research, the silicon carbon oxynitride (SiCON) thin film was deposited on the
silicon (Si) substrate by radio frequency (RF) reactive magnetron sputtering method. To …

Improved humidity sensing performances of boron doped ZnO nanostructured thin films depending on boron concentration

G Algün, M Alshater, N Akçay - Physica Scripta, 2024 - iopscience.iop.org
This study details the production and analysis of undoped zinc oxide (uZnO) and boron (B)
doped zinc oxide nanostructured thin films, with a specific focus on assessing the influence …