A non-equilibrium electronegative plasma serves as the reactive source for semiconductor
dry processing as an advanced technology. This paper reviews the current knowledge about …

Here we demonstrate the oopd1 (object-oriented plasma device for one dimension) particle-
in-cell/Monte Carlo simulation tool for a capacitively coupled chlorine discharge with a …

A chemical reaction mechanism of chlorine plasma under low-pressure conditions that is
widely used in the literature is validated against the experimental data of Y. Wang and JK …

An inductively coupled radio-frequency plasma in chlorine is investigated via a global
(volume-averaged) model, both in continuous and square wave modulated power input …

We propose a method to measure the densities of vibrationally excited Cl 2 (v) molecules in
levels up to v= 3 in pure chlorine inductively coupled plasmas (ICPs). The absorption …

The main goal of this work is to gain a better understanding of a microwave deposition
plasma reactor that is used in the production of optical fibres. The plasma is formed in a …

In this article, experimental and numerical characterization of a dielectric barrier discharge
(DBD)-based coaxial Kr/Cl2 excilamp excited by negative unipolar pulse has been carried …

The aim of this work is to explore the role of electronegativity and the electron power
absorption mechanism in electronegative capacitively coupled oxygen and chlorine …

We have measured the electron drift velocity, density-normalized longitudinal diffusion and
effective ionization coefficients for electrons in Cl 2 and Cl 2–N 2 mixtures over the …

Low-energy electrons can interact with molecules via resonances to cause vibrational
excitation with large cross-sections. Such processes can absorb significant energy from the …