The bulkiness of traditional batteries, as well as frequent charging and electronic detritus
caused by the replacement of old batteries, hinder the ability of low-powered electronic …

Recently, there have been notable advancements in energy harvesting from various
sources, including mechanical vibrations, thermal gradients, and electromagnetic and solar …

This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …

With advancements in artificial intelligence, wearable motion recognition systems based on
flexible nanomaterial sensors exhibit excellent potential for harmonious human–machine …

Microsystems with capabilities of acoustic signal perception and recognition are widely used
in unattended monitoring applications. In order to realize long-term and large-scale …

The paper presents a technique to obtain an electrically-tunable matching between the
series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to …

Wet etching methods of lead zirconate titanate (PZT) film suffer from high residual risk and
severe undercut erosion. In this study, a two-step etching approach replace with the …

Purpose Based on the micro-electro-mechanical system (MEMS) technology, acoustic
emission sensors have gained popularity owing to their small size, consistency, affordability …

This work presents a bimorph piezoelectric microelectromechanical system microphone (b-
PMM) with high receiving sensitivity and signal-to-noise ratio (SNR) based on an array of …

ABSTRACT A slot microring resonator acoustic sensor (MRAS) using the PDMS package
was proposed to achieve ultra-high sensitivity acoustic detection. The acoustic detection …