MEMS piezoelectric sensor for self-powered devices: A review
M Sawane, M Prasad - Materials Science in Semiconductor Processing, 2023 - Elsevier
The bulkiness of traditional batteries, as well as frequent charging and electronic detritus
caused by the replacement of old batteries, hinder the ability of low-powered electronic …
caused by the replacement of old batteries, hinder the ability of low-powered electronic …
[HTML][HTML] MEMS-based energy harvesting devices for low-power applications–a review
Recently, there have been notable advancements in energy harvesting from various
sources, including mechanical vibrations, thermal gradients, and electromagnetic and solar …
sources, including mechanical vibrations, thermal gradients, and electromagnetic and solar …
[HTML][HTML] Recent development and futuristic applications of MEMS based piezoelectric microphones
This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …
microphones along with the fabrication processes involved, application domains, and …
Low‐Cost Data Glove based on deep‐learning‐enhanced flexible multiwalled carbon nanotube sensors for real‐time gesture recognition
Y Li, L Yang, Z He, Y Liu, H Wang… - Advanced Intelligent …, 2022 - Wiley Online Library
With advancements in artificial intelligence, wearable motion recognition systems based on
flexible nanomaterial sensors exhibit excellent potential for harmonious human–machine …
flexible nanomaterial sensors exhibit excellent potential for harmonious human–machine …
Acoustic wake-up technology for microsystems: a review
D Yang, J Zhao - Micromachines, 2023 - mdpi.com
Microsystems with capabilities of acoustic signal perception and recognition are widely used
in unattended monitoring applications. In order to realize long-term and large-scale …
in unattended monitoring applications. In order to realize long-term and large-scale …
Piezoelectric MEMS acoustic transducer with electrically-tunable resonant frequency
The paper presents a technique to obtain an electrically-tunable matching between the
series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to …
series and parallel resonant frequencies of a piezoelectric MEMS acoustic transducer to …
[HTML][HTML] A two-step wet etching process of PZT thin film with ultra-low undercut for MEMS applications
Y Su, Y Liu, Y Fei, L Wang, J Cai, S Chen… - Sensors and Actuators A …, 2023 - Elsevier
Wet etching methods of lead zirconate titanate (PZT) film suffer from high residual risk and
severe undercut erosion. In this study, a two-step etching approach replace with the …
severe undercut erosion. In this study, a two-step etching approach replace with the …
Progress of MEMS acoustic emission sensor: a review
J Zhang, S Zhang, Y Yang, W Zhang - Sensor Review, 2024 - emerald.com
Purpose Based on the micro-electro-mechanical system (MEMS) technology, acoustic
emission sensors have gained popularity owing to their small size, consistency, affordability …
emission sensors have gained popularity owing to their small size, consistency, affordability …
A ScAlN-Based Bimorph Piezoelectric MEMS Microphone Using 3 3 Circular Diaphragms
This work presents a bimorph piezoelectric microelectromechanical system microphone (b-
PMM) with high receiving sensitivity and signal-to-noise ratio (SNR) based on an array of …
PMM) with high receiving sensitivity and signal-to-noise ratio (SNR) based on an array of …
Design of ultra-high sensitivity slot micro-ring resonator acoustic sensor
X Chu, J Cui, M Zhu, R Zhao, W Zhang… - Fiber and Integrated …, 2022 - Taylor & Francis
ABSTRACT A slot microring resonator acoustic sensor (MRAS) using the PDMS package
was proposed to achieve ultra-high sensitivity acoustic detection. The acoustic detection …
was proposed to achieve ultra-high sensitivity acoustic detection. The acoustic detection …