Low temperature (< 700° C) SiO2 and Si-rich SiO2 films: Short review

C Falcony, D Estrada-Wiese, J De Anda… - Journal of Vacuum …, 2023 - pubs.aip.org
SiO2 layers deposited at temperatures (lower than 700 C) have attracted a great deal of
attention for a large variety of applications, since they can be used for dielectric isolation, a …

Resistive switching control for conductive Si-nanocrystals embedded in Si/SiO2 multilayers

KE González–Flores, B Palacios-Márquez… - …, 2018 - iopscience.iop.org
In this paper, we report on the enhanced control of resistive switching in multilayer Si/SiO 2
structures, which permit the formation of Si nanocrystals with a typical size of 5.88 nm and …

[图书][B] Applications of Laser Ablation: Thin Film Deposition, Nanomaterial Synthesis and Surface Modification

D Yang - 2016 - books.google.com
Laser ablation refers to the phenomenon in which a low wavelength and short pulse (ns-fs)
duration of laser beam irradiates the surface of a target to induce instant local vaporization of …

Silicon excess and thermal annealing effects on structural and optical properties of co-sputtered SRO films

A Coyopol, MA Cardona, TD Becerril, LL Jimenez… - Journal of …, 2016 - Elsevier
In this work, the structural and optical properties of co-sputtered SRO (Silicon Rich Oxide)
films are studied as a function of the annealing temperature and the change in the Si …

Effect of the structure on luminescent characteristics of SRO-based light emitting capacitors

L Palacios-Huerta, SA Cabañas-Tay… - …, 2015 - iopscience.iop.org
In this paper, we study the structural, optical and electro-optical properties of silicon rich
oxide (SRO) films, with 6.2 (SRO 30) and 7.3 at.%(SRO 20) of silicon excess thermally …

A comparative study of amorphous silicon carbide and silicon rich oxide for light emission applications

I Vivaldo, M Moreno, A Torres, R Ambrosio… - Journal of …, 2017 - Elsevier
In this work we performed a comparative study of the structural, optical and
photoluminescent properties of amorphous Silicon Carbide (a-Si 1− x C x: H) and Silicon …

Influence of the gate and dielectric thickness on the electro-optical performance of SRO-based LECs: Resistive switching, IR and deep UV emission

SA Cabañas-Tay, L Palacios-Huerta… - Journal of …, 2017 - Elsevier
This work presents the charge transport and electroluminescent properties of silicon rich
oxide (SRO) films with~ 41 at% silicon content and different thicknesses (t SRO= 24, 53 and …

Study of silicon rich oxide light emitter capacitors using textured substrates by metal assisted chemical etching

O Pérez-Díaz, AA González-Fernández… - Journal of …, 2022 - Elsevier
Mono and multilayer silicon rich oxide light-emitting capacitors (SRO-LEC) were fabricated
using both polished and textured Si substrates. The textured substrate surface was treated …

Silicon-rich oxide obtained by low-pressure chemical vapor deposition to develop silicon light sources

J Alarcón-Salazar, R López-Estopier… - … and Applications in …, 2016 - books.google.com
Off stoichiometric silicon oxide, also known as silicon-rich oxide (SRO), is a lightemitting
material that is compatible with silicon technology; therefore, it is a good candidate to be …

Structural evolution and photoluminescence of annealed Si-rich nitride with Si quantum dots prepared by plasma enhanced chemical vapor deposition

X Zeng, W Liao, G Wen, X Wen, W Zheng - Journal of Applied Physics, 2014 - pubs.aip.org
Silicon-rich nitride films were deposited by plasma enhanced chemical vapor deposition.
Silicon quantum dots (Si QDs) were formed by post-thermal annealing processing verified …